12/8/2010	11:41:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2010	11:41:48 AM	Recipe started at 11:41 AM
12/8/2010	11:41:48 AM	H2 valve closed
12/8/2010	11:41:48 AM	BCl3 valve closed
12/8/2010	11:41:48 AM	PH3 valve closed
12/8/2010	11:41:48 AM	SiCl4 pre valve closed
12/8/2010	11:41:48 AM	SiCl4 post valve closed
12/8/2010	11:41:48 AM	Main Vac valve closed
12/8/2010	11:41:48 AM	Bypass valve closed
12/8/2010	11:41:48 AM	Bubbler valve closed
12/8/2010	11:41:48 AM	Helium valve opened
12/8/2010	11:41:48 AM	Helium MFC set to  500.000000
12/8/2010	11:41:48 AM	H2 MFC set to  0.000000
12/8/2010	11:41:48 AM	BCl3 MFC set to  0.000000
12/8/2010	11:41:48 AM	PHl3 MFC set to  0.000000
12/8/2010	11:41:48 AM	SiCl4 MFC set to  0.000000
12/8/2010	11:41:48 AM	Bypass solenoid MFC set to  0.000000
12/8/2010	11:41:48 AM	Tube furnace set to 0
12/8/2010	11:43:09 AM	Helium valve closed
12/8/2010	11:43:09 AM	H2 valve closed
12/8/2010	11:43:09 AM	BCl3 valve closed
12/8/2010	11:43:09 AM	PH3 valve closed
12/8/2010	11:43:09 AM	SiCl4 pre valve closed
12/8/2010	11:43:09 AM	SiCl4 post valve closed
12/8/2010	11:43:09 AM	Main Vac valve closed
12/8/2010	11:43:09 AM	Bypass valve closed
12/8/2010	11:43:09 AM	Bubbler valve closed
12/8/2010	11:43:09 AM	Helium MFC set to  0.000000
12/8/2010	11:43:09 AM	H2 MFC set to  0.000000
12/8/2010	11:43:09 AM	BCl3 MFC set to  0.000000
12/8/2010	11:43:09 AM	PHl3 MFC set to  0.000000
12/8/2010	11:43:09 AM	SiCl4 MFC set to  0.000000
12/8/2010	11:43:09 AM	Bypass solenoid MFC set to  0.000000
12/8/2010	11:43:09 AM	Tube furnace set to 0
12/8/2010	11:43:09 AM	Run finished at 11:43 AM
12/8/2010	11:43:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2010	11:47:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2010	11:47:58 AM	Recipe started at 11:47 AM
12/8/2010	11:47:58 AM	Helium valve closed
12/8/2010	11:47:58 AM	H2 valve closed
12/8/2010	11:47:58 AM	BCl3 valve closed
12/8/2010	11:47:58 AM	PH3 valve closed
12/8/2010	11:47:58 AM	SiCl4 pre valve closed
12/8/2010	11:47:58 AM	SiCl4 post valve closed
12/8/2010	11:47:58 AM	Main Vac valve closed
12/8/2010	11:47:58 AM	Bubbler valve closed
12/8/2010	11:47:58 AM	Bypass valve opened
12/8/2010	11:47:58 AM	Helium MFC set to  0.000000
12/8/2010	11:47:58 AM	H2 MFC set to  0.000000
12/8/2010	11:47:58 AM	BCl3 MFC set to  0.000000
12/8/2010	11:47:58 AM	PHl3 MFC set to  0.000000
12/8/2010	11:47:58 AM	SiCl4 MFC set to  0.000000
12/8/2010	11:47:58 AM	Bypass solenoid MFC set to  0.000000
12/8/2010	11:47:58 AM	Tube furnace set to 0
12/8/2010	11:48:51 AM	Helium valve closed
12/8/2010	11:48:51 AM	H2 valve closed
12/8/2010	11:48:51 AM	BCl3 valve closed
12/8/2010	11:48:51 AM	PH3 valve closed
12/8/2010	11:48:51 AM	SiCl4 pre valve closed
12/8/2010	11:48:51 AM	SiCl4 post valve closed
12/8/2010	11:48:51 AM	Bubbler valve closed
12/8/2010	11:48:51 AM	Main Vac valve opened
12/8/2010	11:48:51 AM	Bypass valve opened
12/8/2010	11:48:51 AM	Helium MFC set to  0.000000
12/8/2010	11:48:51 AM	H2 MFC set to  0.000000
12/8/2010	11:48:51 AM	BCl3 MFC set to  0.000000
12/8/2010	11:48:51 AM	PHl3 MFC set to  0.000000
12/8/2010	11:48:51 AM	SiCl4 MFC set to  0.000000
12/8/2010	11:48:51 AM	Bypass solenoid MFC set to  0.000000
12/8/2010	11:48:51 AM	Tube furnace set to 0
12/8/2010	11:48:51 AM	Run finished at 11:48 AM
12/8/2010	11:48:51 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2010	12:38:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2010	12:38:04 PM	Recipe started at 12:38 PM
12/8/2010	12:38:04 PM	H2 valve closed
12/8/2010	12:38:04 PM	BCl3 valve closed
12/8/2010	12:38:04 PM	PH3 valve closed
12/8/2010	12:38:04 PM	SiCl4 pre valve closed
12/8/2010	12:38:04 PM	SiCl4 post valve closed
12/8/2010	12:38:04 PM	Main Vac valve closed
12/8/2010	12:38:04 PM	Bypass valve closed
12/8/2010	12:38:04 PM	Bubbler valve closed
12/8/2010	12:38:04 PM	Helium valve opened
12/8/2010	12:38:04 PM	Helium MFC set to  500.000000
12/8/2010	12:38:04 PM	H2 MFC set to  0.000000
12/8/2010	12:38:04 PM	BCl3 MFC set to  0.000000
12/8/2010	12:38:04 PM	PHl3 MFC set to  0.000000
12/8/2010	12:38:04 PM	SiCl4 MFC set to  0.000000
12/8/2010	12:38:04 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	12:38:04 PM	Tube furnace set to 0
12/8/2010	12:39:03 PM	Helium valve closed
12/8/2010	12:39:03 PM	H2 valve closed
12/8/2010	12:39:03 PM	BCl3 valve closed
12/8/2010	12:39:03 PM	PH3 valve closed
12/8/2010	12:39:03 PM	SiCl4 pre valve closed
12/8/2010	12:39:03 PM	SiCl4 post valve closed
12/8/2010	12:39:03 PM	Main Vac valve closed
12/8/2010	12:39:03 PM	Bypass valve closed
12/8/2010	12:39:03 PM	Bubbler valve closed
12/8/2010	12:39:03 PM	Helium MFC set to  0.000000
12/8/2010	12:39:03 PM	H2 MFC set to  0.000000
12/8/2010	12:39:03 PM	BCl3 MFC set to  0.000000
12/8/2010	12:39:03 PM	PHl3 MFC set to  0.000000
12/8/2010	12:39:03 PM	SiCl4 MFC set to  0.000000
12/8/2010	12:39:03 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	12:39:04 PM	Tube furnace set to 0
12/8/2010	12:39:04 PM	Run finished at 12:39 PM
12/8/2010	12:39:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2010	1:24:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2010	1:24:55 PM	Recipe started at 1:24 PM
12/8/2010	1:24:55 PM	Helium valve closed
12/8/2010	1:24:55 PM	H2 valve closed
12/8/2010	1:24:55 PM	BCl3 valve closed
12/8/2010	1:24:55 PM	PH3 valve closed
12/8/2010	1:24:55 PM	SiCl4 pre valve closed
12/8/2010	1:24:55 PM	SiCl4 post valve closed
12/8/2010	1:24:55 PM	Main Vac valve closed
12/8/2010	1:24:55 PM	Bubbler valve closed
12/8/2010	1:24:55 PM	Bypass valve opened
12/8/2010	1:24:55 PM	Helium MFC set to  0.000000
12/8/2010	1:24:55 PM	H2 MFC set to  0.000000
12/8/2010	1:24:55 PM	BCl3 MFC set to  0.000000
12/8/2010	1:24:55 PM	PHl3 MFC set to  0.000000
12/8/2010	1:24:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:24:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:24:55 PM	Tube furnace set to 0
12/8/2010	1:27:48 PM	Helium valve closed
12/8/2010	1:27:48 PM	H2 valve closed
12/8/2010	1:27:48 PM	BCl3 valve closed
12/8/2010	1:27:48 PM	PH3 valve closed
12/8/2010	1:27:48 PM	SiCl4 pre valve closed
12/8/2010	1:27:48 PM	SiCl4 post valve closed
12/8/2010	1:27:48 PM	Bubbler valve closed
12/8/2010	1:27:48 PM	Main Vac valve opened
12/8/2010	1:27:48 PM	Bypass valve opened
12/8/2010	1:27:48 PM	Helium MFC set to  0.000000
12/8/2010	1:27:48 PM	H2 MFC set to  0.000000
12/8/2010	1:27:48 PM	BCl3 MFC set to  0.000000
12/8/2010	1:27:48 PM	PHl3 MFC set to  0.000000
12/8/2010	1:27:48 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:27:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:27:48 PM	Tube furnace set to 0
12/8/2010	1:27:48 PM	Run finished at 1:27 PM
12/8/2010	1:27:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2010	1:29:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	1:29:52 PM	Recipe started at 1:29 PM
12/8/2010	1:29:52 PM	Helium valve closed
12/8/2010	1:29:52 PM	H2 valve closed
12/8/2010	1:29:52 PM	BCl3 valve closed
12/8/2010	1:29:52 PM	PH3 valve closed
12/8/2010	1:29:52 PM	SiCl4 pre valve closed
12/8/2010	1:29:52 PM	SiCl4 post valve closed
12/8/2010	1:29:52 PM	Main Vac valve closed
12/8/2010	1:29:52 PM	Bubbler valve closed
12/8/2010	1:29:52 PM	Bypass valve opened
12/8/2010	1:29:52 PM	Helium MFC set to  0.000000
12/8/2010	1:29:52 PM	H2 MFC set to  0.000000
12/8/2010	1:29:52 PM	BCl3 MFC set to  0.000000
12/8/2010	1:29:52 PM	PHl3 MFC set to  0.000000
12/8/2010	1:29:52 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:29:52 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:29:52 PM	Tube furnace set to 0
12/8/2010	1:29:52 PM	Helium valve closed
12/8/2010	1:29:52 PM	H2 valve closed
12/8/2010	1:29:52 PM	BCl3 valve closed
12/8/2010	1:29:52 PM	PH3 valve closed
12/8/2010	1:29:52 PM	SiCl4 pre valve closed
12/8/2010	1:29:52 PM	SiCl4 post valve closed
12/8/2010	1:29:52 PM	Bubbler valve closed
12/8/2010	1:29:52 PM	Main Vac valve opened
12/8/2010	1:29:52 PM	Bypass valve opened
12/8/2010	1:29:52 PM	Helium MFC set to  0.000000
12/8/2010	1:29:52 PM	H2 MFC set to  0.000000
12/8/2010	1:29:52 PM	BCl3 MFC set to  0.000000
12/8/2010	1:29:52 PM	PHl3 MFC set to  0.000000
12/8/2010	1:29:52 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:29:52 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:29:52 PM	Tube furnace set to 0
12/8/2010	1:30:52 PM	H2 valve closed
12/8/2010	1:30:52 PM	BCl3 valve closed
12/8/2010	1:30:52 PM	PH3 valve closed
12/8/2010	1:30:52 PM	SiCl4 pre valve closed
12/8/2010	1:30:52 PM	SiCl4 post valve closed
12/8/2010	1:30:52 PM	Bubbler valve closed
12/8/2010	1:30:52 PM	Helium valve opened
12/8/2010	1:30:52 PM	Main Vac valve opened
12/8/2010	1:30:52 PM	Bypass valve opened
12/8/2010	1:30:52 PM	Helium MFC set to  100.000000
12/8/2010	1:30:52 PM	H2 MFC set to  0.000000
12/8/2010	1:30:52 PM	BCl3 MFC set to  0.000000
12/8/2010	1:30:52 PM	PHl3 MFC set to  0.000000
12/8/2010	1:30:52 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:30:52 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:30:53 PM	Tube furnace set to 0
12/8/2010	1:31:53 PM	Helium valve closed
12/8/2010	1:31:53 PM	H2 valve closed
12/8/2010	1:31:53 PM	BCl3 valve closed
12/8/2010	1:31:53 PM	PH3 valve closed
12/8/2010	1:31:53 PM	SiCl4 pre valve closed
12/8/2010	1:31:53 PM	SiCl4 post valve closed
12/8/2010	1:31:53 PM	Bubbler valve closed
12/8/2010	1:31:53 PM	Main Vac valve opened
12/8/2010	1:31:53 PM	Bypass valve opened
12/8/2010	1:31:53 PM	Helium MFC set to  0.000000
12/8/2010	1:31:53 PM	H2 MFC set to  0.000000
12/8/2010	1:31:53 PM	BCl3 MFC set to  0.000000
12/8/2010	1:31:53 PM	PHl3 MFC set to  0.000000
12/8/2010	1:31:53 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:31:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:31:53 PM	Tube furnace set to 0
12/8/2010	1:32:53 PM	H2 valve closed
12/8/2010	1:32:53 PM	BCl3 valve closed
12/8/2010	1:32:53 PM	PH3 valve closed
12/8/2010	1:32:53 PM	SiCl4 pre valve closed
12/8/2010	1:32:53 PM	SiCl4 post valve closed
12/8/2010	1:32:53 PM	Bubbler valve closed
12/8/2010	1:32:53 PM	Helium valve opened
12/8/2010	1:32:53 PM	Main Vac valve opened
12/8/2010	1:32:53 PM	Bypass valve opened
12/8/2010	1:32:53 PM	Helium MFC set to  100.000000
12/8/2010	1:32:53 PM	H2 MFC set to  0.000000
12/8/2010	1:32:53 PM	BCl3 MFC set to  0.000000
12/8/2010	1:32:53 PM	PHl3 MFC set to  0.000000
12/8/2010	1:32:53 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:32:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:32:53 PM	Tube furnace set to 0
12/8/2010	1:33:53 PM	Helium valve closed
12/8/2010	1:33:53 PM	H2 valve closed
12/8/2010	1:33:53 PM	BCl3 valve closed
12/8/2010	1:33:53 PM	PH3 valve closed
12/8/2010	1:33:53 PM	SiCl4 pre valve closed
12/8/2010	1:33:53 PM	SiCl4 post valve closed
12/8/2010	1:33:53 PM	Bubbler valve closed
12/8/2010	1:33:53 PM	Main Vac valve opened
12/8/2010	1:33:53 PM	Bypass valve opened
12/8/2010	1:33:53 PM	Helium MFC set to  0.000000
12/8/2010	1:33:53 PM	H2 MFC set to  0.000000
12/8/2010	1:33:53 PM	BCl3 MFC set to  0.000000
12/8/2010	1:33:53 PM	PHl3 MFC set to  0.000000
12/8/2010	1:33:53 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:33:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:33:53 PM	Tube furnace set to 0
12/8/2010	1:34:53 PM	H2 valve closed
12/8/2010	1:34:53 PM	BCl3 valve closed
12/8/2010	1:34:53 PM	PH3 valve closed
12/8/2010	1:34:53 PM	SiCl4 pre valve closed
12/8/2010	1:34:53 PM	SiCl4 post valve closed
12/8/2010	1:34:53 PM	Bubbler valve closed
12/8/2010	1:34:53 PM	Helium valve opened
12/8/2010	1:34:53 PM	Main Vac valve opened
12/8/2010	1:34:53 PM	Bypass valve opened
12/8/2010	1:34:53 PM	Helium MFC set to  100.000000
12/8/2010	1:34:53 PM	H2 MFC set to  0.000000
12/8/2010	1:34:53 PM	BCl3 MFC set to  0.000000
12/8/2010	1:34:53 PM	PHl3 MFC set to  0.000000
12/8/2010	1:34:53 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:34:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:34:53 PM	Tube furnace set to 0
12/8/2010	1:35:53 PM	Helium valve closed
12/8/2010	1:35:53 PM	H2 valve closed
12/8/2010	1:35:53 PM	BCl3 valve closed
12/8/2010	1:35:53 PM	PH3 valve closed
12/8/2010	1:35:53 PM	SiCl4 pre valve closed
12/8/2010	1:35:53 PM	SiCl4 post valve closed
12/8/2010	1:35:53 PM	Bubbler valve closed
12/8/2010	1:35:53 PM	Main Vac valve opened
12/8/2010	1:35:53 PM	Bypass valve opened
12/8/2010	1:35:53 PM	Helium MFC set to  0.000000
12/8/2010	1:35:53 PM	H2 MFC set to  0.000000
12/8/2010	1:35:53 PM	BCl3 MFC set to  0.000000
12/8/2010	1:35:53 PM	PHl3 MFC set to  0.000000
12/8/2010	1:35:53 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:35:53 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:35:54 PM	Tube furnace set to 0
12/8/2010	1:36:54 PM	H2 valve closed
12/8/2010	1:36:54 PM	BCl3 valve closed
12/8/2010	1:36:54 PM	PH3 valve closed
12/8/2010	1:36:54 PM	SiCl4 pre valve closed
12/8/2010	1:36:54 PM	SiCl4 post valve closed
12/8/2010	1:36:54 PM	Bubbler valve closed
12/8/2010	1:36:54 PM	Helium valve opened
12/8/2010	1:36:54 PM	Main Vac valve opened
12/8/2010	1:36:54 PM	Bypass valve opened
12/8/2010	1:36:54 PM	Helium MFC set to  100.000000
12/8/2010	1:36:54 PM	H2 MFC set to  0.000000
12/8/2010	1:36:54 PM	BCl3 MFC set to  0.000000
12/8/2010	1:36:54 PM	PHl3 MFC set to  0.000000
12/8/2010	1:36:54 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:36:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:36:54 PM	Tube furnace set to 0
12/8/2010	1:37:54 PM	Helium valve closed
12/8/2010	1:37:54 PM	H2 valve closed
12/8/2010	1:37:54 PM	BCl3 valve closed
12/8/2010	1:37:54 PM	PH3 valve closed
12/8/2010	1:37:54 PM	SiCl4 pre valve closed
12/8/2010	1:37:54 PM	SiCl4 post valve closed
12/8/2010	1:37:54 PM	Bubbler valve closed
12/8/2010	1:37:54 PM	Main Vac valve opened
12/8/2010	1:37:54 PM	Bypass valve opened
12/8/2010	1:37:54 PM	Helium MFC set to  0.000000
12/8/2010	1:37:54 PM	H2 MFC set to  0.000000
12/8/2010	1:37:54 PM	BCl3 MFC set to  0.000000
12/8/2010	1:37:54 PM	PHl3 MFC set to  0.000000
12/8/2010	1:37:54 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:37:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:37:54 PM	Tube furnace set to 0
12/8/2010	1:38:54 PM	H2 valve closed
12/8/2010	1:38:54 PM	BCl3 valve closed
12/8/2010	1:38:54 PM	PH3 valve closed
12/8/2010	1:38:54 PM	SiCl4 pre valve closed
12/8/2010	1:38:54 PM	SiCl4 post valve closed
12/8/2010	1:38:54 PM	Bubbler valve closed
12/8/2010	1:38:54 PM	Helium valve opened
12/8/2010	1:38:54 PM	Main Vac valve opened
12/8/2010	1:38:54 PM	Bypass valve opened
12/8/2010	1:38:54 PM	Helium MFC set to  100.000000
12/8/2010	1:38:54 PM	H2 MFC set to  0.000000
12/8/2010	1:38:54 PM	BCl3 MFC set to  0.000000
12/8/2010	1:38:54 PM	PHl3 MFC set to  0.000000
12/8/2010	1:38:54 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:38:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:38:54 PM	Tube furnace set to 0
12/8/2010	1:39:54 PM	Helium valve closed
12/8/2010	1:39:54 PM	H2 valve closed
12/8/2010	1:39:54 PM	BCl3 valve closed
12/8/2010	1:39:54 PM	PH3 valve closed
12/8/2010	1:39:54 PM	SiCl4 pre valve closed
12/8/2010	1:39:54 PM	SiCl4 post valve closed
12/8/2010	1:39:54 PM	Bubbler valve closed
12/8/2010	1:39:54 PM	Main Vac valve opened
12/8/2010	1:39:54 PM	Bypass valve opened
12/8/2010	1:39:54 PM	Helium MFC set to  0.000000
12/8/2010	1:39:54 PM	H2 MFC set to  0.000000
12/8/2010	1:39:54 PM	BCl3 MFC set to  0.000000
12/8/2010	1:39:54 PM	PHl3 MFC set to  0.000000
12/8/2010	1:39:54 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:39:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:39:54 PM	Tube furnace set to 0
12/8/2010	1:40:54 PM	H2 valve closed
12/8/2010	1:40:54 PM	BCl3 valve closed
12/8/2010	1:40:54 PM	PH3 valve closed
12/8/2010	1:40:54 PM	SiCl4 pre valve closed
12/8/2010	1:40:54 PM	SiCl4 post valve closed
12/8/2010	1:40:54 PM	Bubbler valve closed
12/8/2010	1:40:54 PM	Helium valve opened
12/8/2010	1:40:54 PM	Main Vac valve opened
12/8/2010	1:40:54 PM	Bypass valve opened
12/8/2010	1:40:54 PM	Helium MFC set to  100.000000
12/8/2010	1:40:54 PM	H2 MFC set to  0.000000
12/8/2010	1:40:54 PM	BCl3 MFC set to  0.000000
12/8/2010	1:40:54 PM	PHl3 MFC set to  0.000000
12/8/2010	1:40:54 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:40:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:40:55 PM	Tube furnace set to 0
12/8/2010	1:41:55 PM	Helium valve closed
12/8/2010	1:41:55 PM	H2 valve closed
12/8/2010	1:41:55 PM	BCl3 valve closed
12/8/2010	1:41:55 PM	PH3 valve closed
12/8/2010	1:41:55 PM	SiCl4 pre valve closed
12/8/2010	1:41:55 PM	SiCl4 post valve closed
12/8/2010	1:41:55 PM	Bubbler valve closed
12/8/2010	1:41:55 PM	Main Vac valve opened
12/8/2010	1:41:55 PM	Bypass valve opened
12/8/2010	1:41:55 PM	Helium MFC set to  0.000000
12/8/2010	1:41:55 PM	H2 MFC set to  0.000000
12/8/2010	1:41:55 PM	BCl3 MFC set to  0.000000
12/8/2010	1:41:55 PM	PHl3 MFC set to  0.000000
12/8/2010	1:41:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:41:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:41:55 PM	Tube furnace set to 0
12/8/2010	1:42:55 PM	H2 valve closed
12/8/2010	1:42:55 PM	BCl3 valve closed
12/8/2010	1:42:55 PM	PH3 valve closed
12/8/2010	1:42:55 PM	SiCl4 pre valve closed
12/8/2010	1:42:55 PM	SiCl4 post valve closed
12/8/2010	1:42:55 PM	Bubbler valve closed
12/8/2010	1:42:55 PM	Helium valve opened
12/8/2010	1:42:55 PM	Main Vac valve opened
12/8/2010	1:42:55 PM	Bypass valve opened
12/8/2010	1:42:55 PM	Helium MFC set to  100.000000
12/8/2010	1:42:55 PM	H2 MFC set to  0.000000
12/8/2010	1:42:55 PM	BCl3 MFC set to  0.000000
12/8/2010	1:42:55 PM	PHl3 MFC set to  0.000000
12/8/2010	1:42:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:42:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:42:55 PM	Tube furnace set to 0
12/8/2010	1:43:55 PM	Helium valve closed
12/8/2010	1:43:55 PM	H2 valve closed
12/8/2010	1:43:55 PM	BCl3 valve closed
12/8/2010	1:43:55 PM	PH3 valve closed
12/8/2010	1:43:55 PM	SiCl4 pre valve closed
12/8/2010	1:43:55 PM	SiCl4 post valve closed
12/8/2010	1:43:55 PM	Bubbler valve closed
12/8/2010	1:43:55 PM	Main Vac valve opened
12/8/2010	1:43:55 PM	Bypass valve opened
12/8/2010	1:43:55 PM	Helium MFC set to  0.000000
12/8/2010	1:43:55 PM	H2 MFC set to  0.000000
12/8/2010	1:43:55 PM	BCl3 MFC set to  0.000000
12/8/2010	1:43:55 PM	PHl3 MFC set to  0.000000
12/8/2010	1:43:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:43:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:43:55 PM	Tube furnace set to 0
12/8/2010	1:44:55 PM	H2 valve closed
12/8/2010	1:44:55 PM	BCl3 valve closed
12/8/2010	1:44:55 PM	PH3 valve closed
12/8/2010	1:44:55 PM	SiCl4 pre valve closed
12/8/2010	1:44:55 PM	SiCl4 post valve closed
12/8/2010	1:44:55 PM	Bubbler valve closed
12/8/2010	1:44:55 PM	Helium valve opened
12/8/2010	1:44:55 PM	Main Vac valve opened
12/8/2010	1:44:55 PM	Bypass valve opened
12/8/2010	1:44:55 PM	Helium MFC set to  100.000000
12/8/2010	1:44:55 PM	H2 MFC set to  0.000000
12/8/2010	1:44:55 PM	BCl3 MFC set to  0.000000
12/8/2010	1:44:55 PM	PHl3 MFC set to  0.000000
12/8/2010	1:44:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:44:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:44:55 PM	Tube furnace set to 0
12/8/2010	1:45:55 PM	Helium valve closed
12/8/2010	1:45:55 PM	H2 valve closed
12/8/2010	1:45:55 PM	BCl3 valve closed
12/8/2010	1:45:55 PM	PH3 valve closed
12/8/2010	1:45:55 PM	SiCl4 pre valve closed
12/8/2010	1:45:55 PM	SiCl4 post valve closed
12/8/2010	1:45:55 PM	Bubbler valve closed
12/8/2010	1:45:55 PM	Main Vac valve opened
12/8/2010	1:45:55 PM	Bypass valve opened
12/8/2010	1:45:55 PM	Helium MFC set to  0.000000
12/8/2010	1:45:55 PM	H2 MFC set to  0.000000
12/8/2010	1:45:55 PM	BCl3 MFC set to  0.000000
12/8/2010	1:45:55 PM	PHl3 MFC set to  0.000000
12/8/2010	1:45:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:45:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:45:55 PM	Tube furnace set to 0
12/8/2010	1:46:56 PM	H2 valve closed
12/8/2010	1:46:56 PM	BCl3 valve closed
12/8/2010	1:46:56 PM	PH3 valve closed
12/8/2010	1:46:56 PM	SiCl4 pre valve closed
12/8/2010	1:46:56 PM	SiCl4 post valve closed
12/8/2010	1:46:56 PM	Bubbler valve closed
12/8/2010	1:46:56 PM	Helium valve opened
12/8/2010	1:46:56 PM	Main Vac valve opened
12/8/2010	1:46:56 PM	Bypass valve opened
12/8/2010	1:46:56 PM	Helium MFC set to  100.000000
12/8/2010	1:46:56 PM	H2 MFC set to  0.000000
12/8/2010	1:46:56 PM	BCl3 MFC set to  0.000000
12/8/2010	1:46:56 PM	PHl3 MFC set to  0.000000
12/8/2010	1:46:56 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:46:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:46:56 PM	Tube furnace set to 0
12/8/2010	1:47:56 PM	Helium valve closed
12/8/2010	1:47:56 PM	H2 valve closed
12/8/2010	1:47:56 PM	BCl3 valve closed
12/8/2010	1:47:56 PM	PH3 valve closed
12/8/2010	1:47:56 PM	SiCl4 pre valve closed
12/8/2010	1:47:56 PM	SiCl4 post valve closed
12/8/2010	1:47:56 PM	Bubbler valve closed
12/8/2010	1:47:56 PM	Main Vac valve opened
12/8/2010	1:47:56 PM	Bypass valve opened
12/8/2010	1:47:56 PM	Helium MFC set to  0.000000
12/8/2010	1:47:56 PM	H2 MFC set to  0.000000
12/8/2010	1:47:56 PM	BCl3 MFC set to  0.000000
12/8/2010	1:47:56 PM	PHl3 MFC set to  0.000000
12/8/2010	1:47:56 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:47:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:47:56 PM	Tube furnace set to 0
12/8/2010	1:48:56 PM	H2 valve closed
12/8/2010	1:48:56 PM	BCl3 valve closed
12/8/2010	1:48:56 PM	PH3 valve closed
12/8/2010	1:48:56 PM	SiCl4 pre valve closed
12/8/2010	1:48:56 PM	SiCl4 post valve closed
12/8/2010	1:48:56 PM	Bubbler valve closed
12/8/2010	1:48:56 PM	Helium valve opened
12/8/2010	1:48:56 PM	Main Vac valve opened
12/8/2010	1:48:56 PM	Bypass valve opened
12/8/2010	1:48:56 PM	Helium MFC set to  100.000000
12/8/2010	1:48:56 PM	H2 MFC set to  0.000000
12/8/2010	1:48:56 PM	BCl3 MFC set to  0.000000
12/8/2010	1:48:56 PM	PHl3 MFC set to  0.000000
12/8/2010	1:48:56 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:48:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:48:56 PM	Tube furnace set to 0
12/8/2010	1:49:56 PM	Helium valve closed
12/8/2010	1:49:56 PM	H2 valve closed
12/8/2010	1:49:56 PM	BCl3 valve closed
12/8/2010	1:49:56 PM	PH3 valve closed
12/8/2010	1:49:56 PM	SiCl4 pre valve closed
12/8/2010	1:49:56 PM	SiCl4 post valve closed
12/8/2010	1:49:56 PM	Bubbler valve closed
12/8/2010	1:49:56 PM	Main Vac valve opened
12/8/2010	1:49:56 PM	Bypass valve opened
12/8/2010	1:49:56 PM	Helium MFC set to  0.000000
12/8/2010	1:49:56 PM	H2 MFC set to  0.000000
12/8/2010	1:49:56 PM	BCl3 MFC set to  0.000000
12/8/2010	1:49:56 PM	PHl3 MFC set to  0.000000
12/8/2010	1:49:56 PM	SiCl4 MFC set to  0.000000
12/8/2010	1:49:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	1:49:56 PM	Tube furnace set to 0
12/8/2010	1:49:57 PM	Run finished at 1:49 PM
12/8/2010	1:49:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	2:06:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	2:06:39 PM	Recipe started at 2:06 PM
12/8/2010	2:06:39 PM	Helium valve closed
12/8/2010	2:06:39 PM	H2 valve closed
12/8/2010	2:06:39 PM	BCl3 valve closed
12/8/2010	2:06:39 PM	PH3 valve closed
12/8/2010	2:06:39 PM	SiCl4 pre valve closed
12/8/2010	2:06:39 PM	SiCl4 post valve closed
12/8/2010	2:06:39 PM	Main Vac valve closed
12/8/2010	2:06:39 PM	Bubbler valve closed
12/8/2010	2:06:39 PM	Bypass valve opened
12/8/2010	2:06:39 PM	Helium MFC set to  0.000000
12/8/2010	2:06:39 PM	H2 MFC set to  0.000000
12/8/2010	2:06:39 PM	BCl3 MFC set to  0.000000
12/8/2010	2:06:39 PM	PHl3 MFC set to  0.000000
12/8/2010	2:06:39 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:06:39 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:06:39 PM	Tube furnace set to 0
12/8/2010	2:06:40 PM	Helium valve closed
12/8/2010	2:06:40 PM	H2 valve closed
12/8/2010	2:06:40 PM	BCl3 valve closed
12/8/2010	2:06:40 PM	PH3 valve closed
12/8/2010	2:06:40 PM	SiCl4 pre valve closed
12/8/2010	2:06:40 PM	SiCl4 post valve closed
12/8/2010	2:06:40 PM	Bubbler valve closed
12/8/2010	2:06:40 PM	Main Vac valve opened
12/8/2010	2:06:40 PM	Bypass valve opened
12/8/2010	2:06:40 PM	Helium MFC set to  0.000000
12/8/2010	2:06:40 PM	H2 MFC set to  0.000000
12/8/2010	2:06:40 PM	BCl3 MFC set to  0.000000
12/8/2010	2:06:40 PM	PHl3 MFC set to  0.000000
12/8/2010	2:06:40 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:06:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:06:40 PM	Tube furnace set to 0
12/8/2010	2:07:40 PM	H2 valve closed
12/8/2010	2:07:40 PM	BCl3 valve closed
12/8/2010	2:07:40 PM	PH3 valve closed
12/8/2010	2:07:40 PM	SiCl4 pre valve closed
12/8/2010	2:07:40 PM	SiCl4 post valve closed
12/8/2010	2:07:40 PM	Bubbler valve closed
12/8/2010	2:07:40 PM	Helium valve opened
12/8/2010	2:07:40 PM	Main Vac valve opened
12/8/2010	2:07:40 PM	Bypass valve opened
12/8/2010	2:07:40 PM	Helium MFC set to  100.000000
12/8/2010	2:07:40 PM	H2 MFC set to  0.000000
12/8/2010	2:07:40 PM	BCl3 MFC set to  0.000000
12/8/2010	2:07:40 PM	PHl3 MFC set to  0.000000
12/8/2010	2:07:40 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:07:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:07:40 PM	Tube furnace set to 0
12/8/2010	2:08:40 PM	Helium valve closed
12/8/2010	2:08:40 PM	H2 valve closed
12/8/2010	2:08:40 PM	BCl3 valve closed
12/8/2010	2:08:40 PM	PH3 valve closed
12/8/2010	2:08:40 PM	SiCl4 pre valve closed
12/8/2010	2:08:40 PM	SiCl4 post valve closed
12/8/2010	2:08:40 PM	Bubbler valve closed
12/8/2010	2:08:40 PM	Main Vac valve opened
12/8/2010	2:08:40 PM	Bypass valve opened
12/8/2010	2:08:40 PM	Helium MFC set to  0.000000
12/8/2010	2:08:40 PM	H2 MFC set to  0.000000
12/8/2010	2:08:40 PM	BCl3 MFC set to  0.000000
12/8/2010	2:08:40 PM	PHl3 MFC set to  0.000000
12/8/2010	2:08:40 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:08:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:08:40 PM	Tube furnace set to 0
12/8/2010	2:09:40 PM	H2 valve closed
12/8/2010	2:09:40 PM	BCl3 valve closed
12/8/2010	2:09:40 PM	PH3 valve closed
12/8/2010	2:09:40 PM	SiCl4 pre valve closed
12/8/2010	2:09:40 PM	SiCl4 post valve closed
12/8/2010	2:09:40 PM	Bubbler valve closed
12/8/2010	2:09:40 PM	Helium valve opened
12/8/2010	2:09:40 PM	Main Vac valve opened
12/8/2010	2:09:40 PM	Bypass valve opened
12/8/2010	2:09:40 PM	Helium MFC set to  100.000000
12/8/2010	2:09:40 PM	H2 MFC set to  0.000000
12/8/2010	2:09:40 PM	BCl3 MFC set to  0.000000
12/8/2010	2:09:40 PM	PHl3 MFC set to  0.000000
12/8/2010	2:09:40 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:09:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:09:41 PM	Tube furnace set to 0
12/8/2010	2:10:41 PM	Helium valve closed
12/8/2010	2:10:41 PM	H2 valve closed
12/8/2010	2:10:41 PM	BCl3 valve closed
12/8/2010	2:10:41 PM	PH3 valve closed
12/8/2010	2:10:41 PM	SiCl4 pre valve closed
12/8/2010	2:10:41 PM	SiCl4 post valve closed
12/8/2010	2:10:41 PM	Bubbler valve closed
12/8/2010	2:10:41 PM	Main Vac valve opened
12/8/2010	2:10:41 PM	Bypass valve opened
12/8/2010	2:10:41 PM	Helium MFC set to  0.000000
12/8/2010	2:10:41 PM	H2 MFC set to  0.000000
12/8/2010	2:10:41 PM	BCl3 MFC set to  0.000000
12/8/2010	2:10:41 PM	PHl3 MFC set to  0.000000
12/8/2010	2:10:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:10:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:10:41 PM	Tube furnace set to 0
12/8/2010	2:11:41 PM	H2 valve closed
12/8/2010	2:11:41 PM	BCl3 valve closed
12/8/2010	2:11:41 PM	PH3 valve closed
12/8/2010	2:11:41 PM	SiCl4 pre valve closed
12/8/2010	2:11:41 PM	SiCl4 post valve closed
12/8/2010	2:11:41 PM	Bubbler valve closed
12/8/2010	2:11:41 PM	Helium valve opened
12/8/2010	2:11:41 PM	Main Vac valve opened
12/8/2010	2:11:41 PM	Bypass valve opened
12/8/2010	2:11:41 PM	Helium MFC set to  100.000000
12/8/2010	2:11:41 PM	H2 MFC set to  0.000000
12/8/2010	2:11:41 PM	BCl3 MFC set to  0.000000
12/8/2010	2:11:41 PM	PHl3 MFC set to  0.000000
12/8/2010	2:11:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:11:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:11:41 PM	Tube furnace set to 0
12/8/2010	2:12:41 PM	Helium valve closed
12/8/2010	2:12:41 PM	H2 valve closed
12/8/2010	2:12:41 PM	BCl3 valve closed
12/8/2010	2:12:41 PM	PH3 valve closed
12/8/2010	2:12:41 PM	SiCl4 pre valve closed
12/8/2010	2:12:41 PM	SiCl4 post valve closed
12/8/2010	2:12:41 PM	Bubbler valve closed
12/8/2010	2:12:41 PM	Main Vac valve opened
12/8/2010	2:12:41 PM	Bypass valve opened
12/8/2010	2:12:41 PM	Helium MFC set to  0.000000
12/8/2010	2:12:41 PM	H2 MFC set to  0.000000
12/8/2010	2:12:41 PM	BCl3 MFC set to  0.000000
12/8/2010	2:12:41 PM	PHl3 MFC set to  0.000000
12/8/2010	2:12:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:12:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:12:41 PM	Tube furnace set to 0
12/8/2010	2:13:41 PM	H2 valve closed
12/8/2010	2:13:41 PM	BCl3 valve closed
12/8/2010	2:13:41 PM	PH3 valve closed
12/8/2010	2:13:41 PM	SiCl4 pre valve closed
12/8/2010	2:13:41 PM	SiCl4 post valve closed
12/8/2010	2:13:41 PM	Bubbler valve closed
12/8/2010	2:13:41 PM	Helium valve opened
12/8/2010	2:13:41 PM	Main Vac valve opened
12/8/2010	2:13:41 PM	Bypass valve opened
12/8/2010	2:13:41 PM	Helium MFC set to  100.000000
12/8/2010	2:13:41 PM	H2 MFC set to  0.000000
12/8/2010	2:13:41 PM	BCl3 MFC set to  0.000000
12/8/2010	2:13:41 PM	PHl3 MFC set to  0.000000
12/8/2010	2:13:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:13:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:13:41 PM	Tube furnace set to 0
12/8/2010	2:14:41 PM	Helium valve closed
12/8/2010	2:14:41 PM	H2 valve closed
12/8/2010	2:14:41 PM	BCl3 valve closed
12/8/2010	2:14:41 PM	PH3 valve closed
12/8/2010	2:14:41 PM	SiCl4 pre valve closed
12/8/2010	2:14:41 PM	SiCl4 post valve closed
12/8/2010	2:14:41 PM	Bubbler valve closed
12/8/2010	2:14:41 PM	Main Vac valve opened
12/8/2010	2:14:41 PM	Bypass valve opened
12/8/2010	2:14:41 PM	Helium MFC set to  0.000000
12/8/2010	2:14:41 PM	H2 MFC set to  0.000000
12/8/2010	2:14:41 PM	BCl3 MFC set to  0.000000
12/8/2010	2:14:41 PM	PHl3 MFC set to  0.000000
12/8/2010	2:14:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:14:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:14:41 PM	Tube furnace set to 0
12/8/2010	2:15:41 PM	H2 valve closed
12/8/2010	2:15:42 PM	BCl3 valve closed
12/8/2010	2:15:42 PM	PH3 valve closed
12/8/2010	2:15:42 PM	SiCl4 pre valve closed
12/8/2010	2:15:42 PM	SiCl4 post valve closed
12/8/2010	2:15:42 PM	Bubbler valve closed
12/8/2010	2:15:42 PM	Helium valve opened
12/8/2010	2:15:42 PM	Main Vac valve opened
12/8/2010	2:15:42 PM	Bypass valve opened
12/8/2010	2:15:42 PM	Helium MFC set to  100.000000
12/8/2010	2:15:42 PM	H2 MFC set to  0.000000
12/8/2010	2:15:42 PM	BCl3 MFC set to  0.000000
12/8/2010	2:15:42 PM	PHl3 MFC set to  0.000000
12/8/2010	2:15:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:15:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:15:42 PM	Tube furnace set to 0
12/8/2010	2:16:42 PM	Helium valve closed
12/8/2010	2:16:42 PM	H2 valve closed
12/8/2010	2:16:42 PM	BCl3 valve closed
12/8/2010	2:16:42 PM	PH3 valve closed
12/8/2010	2:16:42 PM	SiCl4 pre valve closed
12/8/2010	2:16:42 PM	SiCl4 post valve closed
12/8/2010	2:16:42 PM	Bubbler valve closed
12/8/2010	2:16:42 PM	Main Vac valve opened
12/8/2010	2:16:42 PM	Bypass valve opened
12/8/2010	2:16:42 PM	Helium MFC set to  0.000000
12/8/2010	2:16:42 PM	H2 MFC set to  0.000000
12/8/2010	2:16:42 PM	BCl3 MFC set to  0.000000
12/8/2010	2:16:42 PM	PHl3 MFC set to  0.000000
12/8/2010	2:16:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:16:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:16:42 PM	Tube furnace set to 0
12/8/2010	2:17:42 PM	H2 valve closed
12/8/2010	2:17:42 PM	BCl3 valve closed
12/8/2010	2:17:42 PM	PH3 valve closed
12/8/2010	2:17:42 PM	SiCl4 pre valve closed
12/8/2010	2:17:42 PM	SiCl4 post valve closed
12/8/2010	2:17:42 PM	Bubbler valve closed
12/8/2010	2:17:42 PM	Helium valve opened
12/8/2010	2:17:42 PM	Main Vac valve opened
12/8/2010	2:17:42 PM	Bypass valve opened
12/8/2010	2:17:42 PM	Helium MFC set to  100.000000
12/8/2010	2:17:42 PM	H2 MFC set to  0.000000
12/8/2010	2:17:42 PM	BCl3 MFC set to  0.000000
12/8/2010	2:17:42 PM	PHl3 MFC set to  0.000000
12/8/2010	2:17:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:17:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:17:42 PM	Tube furnace set to 0
12/8/2010	2:18:42 PM	Helium valve closed
12/8/2010	2:18:42 PM	H2 valve closed
12/8/2010	2:18:42 PM	BCl3 valve closed
12/8/2010	2:18:42 PM	PH3 valve closed
12/8/2010	2:18:42 PM	SiCl4 pre valve closed
12/8/2010	2:18:42 PM	SiCl4 post valve closed
12/8/2010	2:18:42 PM	Bubbler valve closed
12/8/2010	2:18:42 PM	Main Vac valve opened
12/8/2010	2:18:42 PM	Bypass valve opened
12/8/2010	2:18:42 PM	Helium MFC set to  0.000000
12/8/2010	2:18:42 PM	H2 MFC set to  0.000000
12/8/2010	2:18:42 PM	BCl3 MFC set to  0.000000
12/8/2010	2:18:42 PM	PHl3 MFC set to  0.000000
12/8/2010	2:18:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:18:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:18:42 PM	Tube furnace set to 0
12/8/2010	2:19:42 PM	H2 valve closed
12/8/2010	2:19:42 PM	BCl3 valve closed
12/8/2010	2:19:42 PM	PH3 valve closed
12/8/2010	2:19:42 PM	SiCl4 pre valve closed
12/8/2010	2:19:42 PM	SiCl4 post valve closed
12/8/2010	2:19:42 PM	Bubbler valve closed
12/8/2010	2:19:42 PM	Helium valve opened
12/8/2010	2:19:42 PM	Main Vac valve opened
12/8/2010	2:19:42 PM	Bypass valve opened
12/8/2010	2:19:42 PM	Helium MFC set to  100.000000
12/8/2010	2:19:42 PM	H2 MFC set to  0.000000
12/8/2010	2:19:42 PM	BCl3 MFC set to  0.000000
12/8/2010	2:19:42 PM	PHl3 MFC set to  0.000000
12/8/2010	2:19:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:19:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:19:42 PM	Tube furnace set to 0
12/8/2010	2:20:42 PM	Helium valve closed
12/8/2010	2:20:42 PM	H2 valve closed
12/8/2010	2:20:42 PM	BCl3 valve closed
12/8/2010	2:20:42 PM	PH3 valve closed
12/8/2010	2:20:42 PM	SiCl4 pre valve closed
12/8/2010	2:20:42 PM	SiCl4 post valve closed
12/8/2010	2:20:42 PM	Bubbler valve closed
12/8/2010	2:20:42 PM	Main Vac valve opened
12/8/2010	2:20:42 PM	Bypass valve opened
12/8/2010	2:20:42 PM	Helium MFC set to  0.000000
12/8/2010	2:20:42 PM	H2 MFC set to  0.000000
12/8/2010	2:20:42 PM	BCl3 MFC set to  0.000000
12/8/2010	2:20:43 PM	PHl3 MFC set to  0.000000
12/8/2010	2:20:43 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:20:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:20:43 PM	Tube furnace set to 0
12/8/2010	2:21:43 PM	H2 valve closed
12/8/2010	2:21:43 PM	BCl3 valve closed
12/8/2010	2:21:43 PM	PH3 valve closed
12/8/2010	2:21:43 PM	SiCl4 pre valve closed
12/8/2010	2:21:43 PM	SiCl4 post valve closed
12/8/2010	2:21:43 PM	Bubbler valve closed
12/8/2010	2:21:43 PM	Helium valve opened
12/8/2010	2:21:43 PM	Main Vac valve opened
12/8/2010	2:21:43 PM	Bypass valve opened
12/8/2010	2:21:43 PM	Helium MFC set to  100.000000
12/8/2010	2:21:43 PM	H2 MFC set to  0.000000
12/8/2010	2:21:43 PM	BCl3 MFC set to  0.000000
12/8/2010	2:21:43 PM	PHl3 MFC set to  0.000000
12/8/2010	2:21:43 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:21:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:21:43 PM	Tube furnace set to 0
12/8/2010	2:22:43 PM	Helium valve closed
12/8/2010	2:22:43 PM	H2 valve closed
12/8/2010	2:22:43 PM	BCl3 valve closed
12/8/2010	2:22:43 PM	PH3 valve closed
12/8/2010	2:22:43 PM	SiCl4 pre valve closed
12/8/2010	2:22:43 PM	SiCl4 post valve closed
12/8/2010	2:22:43 PM	Bubbler valve closed
12/8/2010	2:22:43 PM	Main Vac valve opened
12/8/2010	2:22:43 PM	Bypass valve opened
12/8/2010	2:22:43 PM	Helium MFC set to  0.000000
12/8/2010	2:22:43 PM	H2 MFC set to  0.000000
12/8/2010	2:22:43 PM	BCl3 MFC set to  0.000000
12/8/2010	2:22:43 PM	PHl3 MFC set to  0.000000
12/8/2010	2:22:43 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:22:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:22:43 PM	Tube furnace set to 0
12/8/2010	2:23:43 PM	H2 valve closed
12/8/2010	2:23:43 PM	BCl3 valve closed
12/8/2010	2:23:43 PM	PH3 valve closed
12/8/2010	2:23:43 PM	SiCl4 pre valve closed
12/8/2010	2:23:43 PM	SiCl4 post valve closed
12/8/2010	2:23:43 PM	Bubbler valve closed
12/8/2010	2:23:43 PM	Helium valve opened
12/8/2010	2:23:43 PM	Main Vac valve opened
12/8/2010	2:23:43 PM	Bypass valve opened
12/8/2010	2:23:43 PM	Helium MFC set to  100.000000
12/8/2010	2:23:43 PM	H2 MFC set to  0.000000
12/8/2010	2:23:43 PM	BCl3 MFC set to  0.000000
12/8/2010	2:23:43 PM	PHl3 MFC set to  0.000000
12/8/2010	2:23:43 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:23:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:23:43 PM	Tube furnace set to 0
12/8/2010	2:24:43 PM	Helium valve closed
12/8/2010	2:24:43 PM	H2 valve closed
12/8/2010	2:24:43 PM	BCl3 valve closed
12/8/2010	2:24:43 PM	PH3 valve closed
12/8/2010	2:24:43 PM	SiCl4 pre valve closed
12/8/2010	2:24:43 PM	SiCl4 post valve closed
12/8/2010	2:24:43 PM	Bubbler valve closed
12/8/2010	2:24:43 PM	Main Vac valve opened
12/8/2010	2:24:43 PM	Bypass valve opened
12/8/2010	2:24:43 PM	Helium MFC set to  0.000000
12/8/2010	2:24:43 PM	H2 MFC set to  0.000000
12/8/2010	2:24:43 PM	BCl3 MFC set to  0.000000
12/8/2010	2:24:43 PM	PHl3 MFC set to  0.000000
12/8/2010	2:24:43 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:24:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:24:43 PM	Tube furnace set to 0
12/8/2010	2:25:43 PM	H2 valve closed
12/8/2010	2:25:43 PM	BCl3 valve closed
12/8/2010	2:25:43 PM	PH3 valve closed
12/8/2010	2:25:43 PM	SiCl4 pre valve closed
12/8/2010	2:25:43 PM	SiCl4 post valve closed
12/8/2010	2:25:43 PM	Bubbler valve closed
12/8/2010	2:25:43 PM	Helium valve opened
12/8/2010	2:25:43 PM	Main Vac valve opened
12/8/2010	2:25:43 PM	Bypass valve opened
12/8/2010	2:25:43 PM	Helium MFC set to  100.000000
12/8/2010	2:25:43 PM	H2 MFC set to  0.000000
12/8/2010	2:25:43 PM	BCl3 MFC set to  0.000000
12/8/2010	2:25:43 PM	PHl3 MFC set to  0.000000
12/8/2010	2:25:43 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:25:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:25:44 PM	Tube furnace set to 0
12/8/2010	2:26:44 PM	Helium valve closed
12/8/2010	2:26:44 PM	H2 valve closed
12/8/2010	2:26:44 PM	BCl3 valve closed
12/8/2010	2:26:44 PM	PH3 valve closed
12/8/2010	2:26:44 PM	SiCl4 pre valve closed
12/8/2010	2:26:44 PM	SiCl4 post valve closed
12/8/2010	2:26:44 PM	Bubbler valve closed
12/8/2010	2:26:44 PM	Main Vac valve opened
12/8/2010	2:26:44 PM	Bypass valve opened
12/8/2010	2:26:44 PM	Helium MFC set to  0.000000
12/8/2010	2:26:44 PM	H2 MFC set to  0.000000
12/8/2010	2:26:44 PM	BCl3 MFC set to  0.000000
12/8/2010	2:26:44 PM	PHl3 MFC set to  0.000000
12/8/2010	2:26:44 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:26:44 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:26:44 PM	Tube furnace set to 0
12/8/2010	2:26:45 PM	Run finished at 2:26 PM
12/8/2010	2:26:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	2:35:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	2:36:02 PM	Recipe started at 2:35 PM
12/8/2010	2:36:02 PM	Helium valve closed
12/8/2010	2:36:02 PM	H2 valve closed
12/8/2010	2:36:02 PM	BCl3 valve closed
12/8/2010	2:36:02 PM	PH3 valve closed
12/8/2010	2:36:02 PM	SiCl4 pre valve closed
12/8/2010	2:36:02 PM	SiCl4 post valve closed
12/8/2010	2:36:02 PM	Main Vac valve closed
12/8/2010	2:36:02 PM	Bubbler valve closed
12/8/2010	2:36:02 PM	Bypass valve opened
12/8/2010	2:36:02 PM	Helium MFC set to  0.000000
12/8/2010	2:36:02 PM	H2 MFC set to  0.000000
12/8/2010	2:36:02 PM	BCl3 MFC set to  0.000000
12/8/2010	2:36:02 PM	PHl3 MFC set to  0.000000
12/8/2010	2:36:02 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:36:02 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:36:03 PM	Tube furnace set to 0
12/8/2010	2:36:03 PM	Helium valve closed
12/8/2010	2:36:03 PM	H2 valve closed
12/8/2010	2:36:03 PM	BCl3 valve closed
12/8/2010	2:36:03 PM	PH3 valve closed
12/8/2010	2:36:03 PM	SiCl4 pre valve closed
12/8/2010	2:36:03 PM	SiCl4 post valve closed
12/8/2010	2:36:03 PM	Bubbler valve closed
12/8/2010	2:36:03 PM	Main Vac valve opened
12/8/2010	2:36:03 PM	Bypass valve opened
12/8/2010	2:36:03 PM	Helium MFC set to  0.000000
12/8/2010	2:36:03 PM	H2 MFC set to  0.000000
12/8/2010	2:36:03 PM	BCl3 MFC set to  0.000000
12/8/2010	2:36:03 PM	PHl3 MFC set to  0.000000
12/8/2010	2:36:03 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:36:03 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:36:03 PM	Tube furnace set to 0
12/8/2010	2:37:03 PM	H2 valve closed
12/8/2010	2:37:03 PM	BCl3 valve closed
12/8/2010	2:37:03 PM	PH3 valve closed
12/8/2010	2:37:03 PM	SiCl4 pre valve closed
12/8/2010	2:37:03 PM	SiCl4 post valve closed
12/8/2010	2:37:03 PM	Bubbler valve closed
12/8/2010	2:37:03 PM	Helium valve opened
12/8/2010	2:37:03 PM	Main Vac valve opened
12/8/2010	2:37:03 PM	Bypass valve opened
12/8/2010	2:37:03 PM	Helium MFC set to  100.000000
12/8/2010	2:37:03 PM	H2 MFC set to  0.000000
12/8/2010	2:37:03 PM	BCl3 MFC set to  0.000000
12/8/2010	2:37:03 PM	PHl3 MFC set to  0.000000
12/8/2010	2:37:03 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:37:03 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:37:03 PM	Tube furnace set to 0
12/8/2010	2:38:03 PM	Helium valve closed
12/8/2010	2:38:03 PM	H2 valve closed
12/8/2010	2:38:03 PM	BCl3 valve closed
12/8/2010	2:38:03 PM	PH3 valve closed
12/8/2010	2:38:03 PM	SiCl4 pre valve closed
12/8/2010	2:38:03 PM	SiCl4 post valve closed
12/8/2010	2:38:03 PM	Bubbler valve closed
12/8/2010	2:38:03 PM	Main Vac valve opened
12/8/2010	2:38:03 PM	Bypass valve opened
12/8/2010	2:38:03 PM	Helium MFC set to  0.000000
12/8/2010	2:38:03 PM	H2 MFC set to  0.000000
12/8/2010	2:38:03 PM	BCl3 MFC set to  0.000000
12/8/2010	2:38:03 PM	PHl3 MFC set to  0.000000
12/8/2010	2:38:03 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:38:03 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:38:03 PM	Tube furnace set to 0
12/8/2010	2:39:03 PM	H2 valve closed
12/8/2010	2:39:03 PM	BCl3 valve closed
12/8/2010	2:39:03 PM	PH3 valve closed
12/8/2010	2:39:03 PM	SiCl4 pre valve closed
12/8/2010	2:39:03 PM	SiCl4 post valve closed
12/8/2010	2:39:03 PM	Bubbler valve closed
12/8/2010	2:39:03 PM	Helium valve opened
12/8/2010	2:39:03 PM	Main Vac valve opened
12/8/2010	2:39:03 PM	Bypass valve opened
12/8/2010	2:39:03 PM	Helium MFC set to  100.000000
12/8/2010	2:39:03 PM	H2 MFC set to  0.000000
12/8/2010	2:39:03 PM	BCl3 MFC set to  0.000000
12/8/2010	2:39:03 PM	PHl3 MFC set to  0.000000
12/8/2010	2:39:03 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:39:03 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:39:04 PM	Tube furnace set to 0
12/8/2010	2:40:04 PM	Helium valve closed
12/8/2010	2:40:04 PM	H2 valve closed
12/8/2010	2:40:04 PM	BCl3 valve closed
12/8/2010	2:40:04 PM	PH3 valve closed
12/8/2010	2:40:04 PM	SiCl4 pre valve closed
12/8/2010	2:40:04 PM	SiCl4 post valve closed
12/8/2010	2:40:04 PM	Bubbler valve closed
12/8/2010	2:40:04 PM	Main Vac valve opened
12/8/2010	2:40:04 PM	Bypass valve opened
12/8/2010	2:40:04 PM	Helium MFC set to  0.000000
12/8/2010	2:40:04 PM	H2 MFC set to  0.000000
12/8/2010	2:40:04 PM	BCl3 MFC set to  0.000000
12/8/2010	2:40:04 PM	PHl3 MFC set to  0.000000
12/8/2010	2:40:04 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:40:04 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:40:04 PM	Tube furnace set to 0
12/8/2010	2:41:04 PM	H2 valve closed
12/8/2010	2:41:04 PM	BCl3 valve closed
12/8/2010	2:41:04 PM	PH3 valve closed
12/8/2010	2:41:04 PM	SiCl4 pre valve closed
12/8/2010	2:41:04 PM	SiCl4 post valve closed
12/8/2010	2:41:04 PM	Bubbler valve closed
12/8/2010	2:41:04 PM	Helium valve opened
12/8/2010	2:41:04 PM	Main Vac valve opened
12/8/2010	2:41:04 PM	Bypass valve opened
12/8/2010	2:41:04 PM	Helium MFC set to  100.000000
12/8/2010	2:41:04 PM	H2 MFC set to  0.000000
12/8/2010	2:41:04 PM	BCl3 MFC set to  0.000000
12/8/2010	2:41:04 PM	PHl3 MFC set to  0.000000
12/8/2010	2:41:04 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:41:04 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:41:04 PM	Tube furnace set to 0
12/8/2010	2:42:04 PM	Helium valve closed
12/8/2010	2:42:04 PM	H2 valve closed
12/8/2010	2:42:04 PM	BCl3 valve closed
12/8/2010	2:42:04 PM	PH3 valve closed
12/8/2010	2:42:04 PM	SiCl4 pre valve closed
12/8/2010	2:42:04 PM	SiCl4 post valve closed
12/8/2010	2:42:04 PM	Bubbler valve closed
12/8/2010	2:42:04 PM	Main Vac valve opened
12/8/2010	2:42:04 PM	Bypass valve opened
12/8/2010	2:42:04 PM	Helium MFC set to  0.000000
12/8/2010	2:42:04 PM	H2 MFC set to  0.000000
12/8/2010	2:42:04 PM	BCl3 MFC set to  0.000000
12/8/2010	2:42:04 PM	PHl3 MFC set to  0.000000
12/8/2010	2:42:04 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:42:04 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:42:04 PM	Tube furnace set to 0
12/8/2010	2:43:04 PM	H2 valve closed
12/8/2010	2:43:04 PM	BCl3 valve closed
12/8/2010	2:43:04 PM	PH3 valve closed
12/8/2010	2:43:04 PM	SiCl4 pre valve closed
12/8/2010	2:43:04 PM	SiCl4 post valve closed
12/8/2010	2:43:04 PM	Bubbler valve closed
12/8/2010	2:43:04 PM	Helium valve opened
12/8/2010	2:43:04 PM	Main Vac valve opened
12/8/2010	2:43:04 PM	Bypass valve opened
12/8/2010	2:43:04 PM	Helium MFC set to  100.000000
12/8/2010	2:43:04 PM	H2 MFC set to  0.000000
12/8/2010	2:43:04 PM	BCl3 MFC set to  0.000000
12/8/2010	2:43:04 PM	PHl3 MFC set to  0.000000
12/8/2010	2:43:04 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:43:04 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:43:04 PM	Tube furnace set to 0
12/8/2010	2:44:04 PM	Helium valve closed
12/8/2010	2:44:04 PM	H2 valve closed
12/8/2010	2:44:04 PM	BCl3 valve closed
12/8/2010	2:44:04 PM	PH3 valve closed
12/8/2010	2:44:04 PM	SiCl4 pre valve closed
12/8/2010	2:44:04 PM	SiCl4 post valve closed
12/8/2010	2:44:04 PM	Bubbler valve closed
12/8/2010	2:44:04 PM	Main Vac valve opened
12/8/2010	2:44:04 PM	Bypass valve opened
12/8/2010	2:44:04 PM	Helium MFC set to  0.000000
12/8/2010	2:44:04 PM	H2 MFC set to  0.000000
12/8/2010	2:44:04 PM	BCl3 MFC set to  0.000000
12/8/2010	2:44:04 PM	PHl3 MFC set to  0.000000
12/8/2010	2:44:04 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:44:04 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:44:05 PM	Tube furnace set to 0
12/8/2010	2:44:38 PM	Run aborted at 2:44 PM
12/8/2010	2:44:38 PM	Helium valve closed
12/8/2010	2:44:38 PM	H2 valve closed
12/8/2010	2:44:38 PM	BCl3 valve closed
12/8/2010	2:44:38 PM	PH3 valve closed
12/8/2010	2:44:38 PM	SiCl4 pre valve closed
12/8/2010	2:44:38 PM	SiCl4 post valve closed
12/8/2010	2:44:38 PM	Bypass valve closed
12/8/2010	2:44:38 PM	Main Vac valve closed
12/8/2010	2:44:38 PM	Bubbler valve closed
12/8/2010	2:44:38 PM	Helium MFC set to  0.000000
12/8/2010	2:44:38 PM	H2 MFC set to  0.000000
12/8/2010	2:44:38 PM	BCl3 MFC set to  0.000000
12/8/2010	2:44:38 PM	PHl3 MFC set to  0.000000
12/8/2010	2:44:38 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:44:38 PM	Tube furnace set to 0
12/8/2010	2:44:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	2:44:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2010	2:44:44 PM	Recipe started at 2:44 PM
12/8/2010	2:44:44 PM	Helium valve closed
12/8/2010	2:44:44 PM	H2 valve closed
12/8/2010	2:44:44 PM	BCl3 valve closed
12/8/2010	2:44:44 PM	PH3 valve closed
12/8/2010	2:44:44 PM	SiCl4 pre valve closed
12/8/2010	2:44:44 PM	SiCl4 post valve closed
12/8/2010	2:44:44 PM	Main Vac valve closed
12/8/2010	2:44:44 PM	Bubbler valve closed
12/8/2010	2:44:44 PM	Bypass valve opened
12/8/2010	2:44:44 PM	Helium MFC set to  0.000000
12/8/2010	2:44:44 PM	H2 MFC set to  0.000000
12/8/2010	2:44:44 PM	BCl3 MFC set to  0.000000
12/8/2010	2:44:44 PM	PHl3 MFC set to  0.000000
12/8/2010	2:44:44 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:44:44 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:44:45 PM	Tube furnace set to 0
12/8/2010	2:44:45 PM	Helium valve closed
12/8/2010	2:44:45 PM	H2 valve closed
12/8/2010	2:44:45 PM	BCl3 valve closed
12/8/2010	2:44:45 PM	PH3 valve closed
12/8/2010	2:44:45 PM	SiCl4 pre valve closed
12/8/2010	2:44:45 PM	SiCl4 post valve closed
12/8/2010	2:44:45 PM	Bubbler valve closed
12/8/2010	2:44:45 PM	Main Vac valve opened
12/8/2010	2:44:45 PM	Bypass valve opened
12/8/2010	2:44:45 PM	Helium MFC set to  0.000000
12/8/2010	2:44:45 PM	H2 MFC set to  0.000000
12/8/2010	2:44:45 PM	BCl3 MFC set to  0.000000
12/8/2010	2:44:45 PM	PHl3 MFC set to  0.000000
12/8/2010	2:44:45 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:44:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:44:45 PM	Tube furnace set to 0
12/8/2010	2:44:45 PM	Run finished at 2:44 PM
12/8/2010	2:44:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2010	2:46:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	2:46:53 PM	Recipe started at 2:46 PM
12/8/2010	2:46:53 PM	Helium valve closed
12/8/2010	2:46:53 PM	H2 valve closed
12/8/2010	2:46:53 PM	BCl3 valve closed
12/8/2010	2:46:53 PM	PH3 valve closed
12/8/2010	2:46:53 PM	SiCl4 pre valve closed
12/8/2010	2:46:53 PM	SiCl4 post valve closed
12/8/2010	2:46:54 PM	Main Vac valve closed
12/8/2010	2:46:54 PM	Bubbler valve closed
12/8/2010	2:46:54 PM	Bypass valve opened
12/8/2010	2:46:54 PM	Helium MFC set to  0.000000
12/8/2010	2:46:54 PM	H2 MFC set to  0.000000
12/8/2010	2:46:54 PM	BCl3 MFC set to  0.000000
12/8/2010	2:46:54 PM	PHl3 MFC set to  0.000000
12/8/2010	2:46:54 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:46:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:46:54 PM	Tube furnace set to 0
12/8/2010	2:46:54 PM	Helium valve closed
12/8/2010	2:46:54 PM	H2 valve closed
12/8/2010	2:46:54 PM	BCl3 valve closed
12/8/2010	2:46:54 PM	PH3 valve closed
12/8/2010	2:46:54 PM	SiCl4 pre valve closed
12/8/2010	2:46:54 PM	SiCl4 post valve closed
12/8/2010	2:46:54 PM	Bubbler valve closed
12/8/2010	2:46:54 PM	Main Vac valve opened
12/8/2010	2:46:54 PM	Bypass valve opened
12/8/2010	2:46:54 PM	Helium MFC set to  0.000000
12/8/2010	2:46:54 PM	H2 MFC set to  0.000000
12/8/2010	2:46:54 PM	BCl3 MFC set to  0.000000
12/8/2010	2:46:54 PM	PHl3 MFC set to  0.000000
12/8/2010	2:46:54 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:46:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:46:54 PM	Tube furnace set to 0
12/8/2010	2:47:54 PM	H2 valve closed
12/8/2010	2:47:54 PM	BCl3 valve closed
12/8/2010	2:47:54 PM	PH3 valve closed
12/8/2010	2:47:54 PM	SiCl4 pre valve closed
12/8/2010	2:47:54 PM	SiCl4 post valve closed
12/8/2010	2:47:54 PM	Bubbler valve closed
12/8/2010	2:47:54 PM	Helium valve opened
12/8/2010	2:47:54 PM	Main Vac valve opened
12/8/2010	2:47:54 PM	Bypass valve opened
12/8/2010	2:47:54 PM	Helium MFC set to  100.000000
12/8/2010	2:47:54 PM	H2 MFC set to  0.000000
12/8/2010	2:47:54 PM	BCl3 MFC set to  0.000000
12/8/2010	2:47:54 PM	PHl3 MFC set to  0.000000
12/8/2010	2:47:54 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:47:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:47:54 PM	Tube furnace set to 0
12/8/2010	2:48:54 PM	Helium valve closed
12/8/2010	2:48:54 PM	H2 valve closed
12/8/2010	2:48:54 PM	BCl3 valve closed
12/8/2010	2:48:54 PM	PH3 valve closed
12/8/2010	2:48:54 PM	SiCl4 pre valve closed
12/8/2010	2:48:54 PM	SiCl4 post valve closed
12/8/2010	2:48:54 PM	Bubbler valve closed
12/8/2010	2:48:54 PM	Main Vac valve opened
12/8/2010	2:48:54 PM	Bypass valve opened
12/8/2010	2:48:54 PM	Helium MFC set to  0.000000
12/8/2010	2:48:54 PM	H2 MFC set to  0.000000
12/8/2010	2:48:54 PM	BCl3 MFC set to  0.000000
12/8/2010	2:48:54 PM	PHl3 MFC set to  0.000000
12/8/2010	2:48:54 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:48:54 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:48:55 PM	Tube furnace set to 0
12/8/2010	2:49:55 PM	H2 valve closed
12/8/2010	2:49:55 PM	BCl3 valve closed
12/8/2010	2:49:55 PM	PH3 valve closed
12/8/2010	2:49:55 PM	SiCl4 pre valve closed
12/8/2010	2:49:55 PM	SiCl4 post valve closed
12/8/2010	2:49:55 PM	Bubbler valve closed
12/8/2010	2:49:55 PM	Helium valve opened
12/8/2010	2:49:55 PM	Main Vac valve opened
12/8/2010	2:49:55 PM	Bypass valve opened
12/8/2010	2:49:55 PM	Helium MFC set to  100.000000
12/8/2010	2:49:55 PM	H2 MFC set to  0.000000
12/8/2010	2:49:55 PM	BCl3 MFC set to  0.000000
12/8/2010	2:49:55 PM	PHl3 MFC set to  0.000000
12/8/2010	2:49:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:49:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:49:55 PM	Tube furnace set to 0
12/8/2010	2:50:55 PM	Helium valve closed
12/8/2010	2:50:55 PM	H2 valve closed
12/8/2010	2:50:55 PM	BCl3 valve closed
12/8/2010	2:50:55 PM	PH3 valve closed
12/8/2010	2:50:55 PM	SiCl4 pre valve closed
12/8/2010	2:50:55 PM	SiCl4 post valve closed
12/8/2010	2:50:55 PM	Bubbler valve closed
12/8/2010	2:50:55 PM	Main Vac valve opened
12/8/2010	2:50:55 PM	Bypass valve opened
12/8/2010	2:50:55 PM	Helium MFC set to  0.000000
12/8/2010	2:50:55 PM	H2 MFC set to  0.000000
12/8/2010	2:50:55 PM	BCl3 MFC set to  0.000000
12/8/2010	2:50:55 PM	PHl3 MFC set to  0.000000
12/8/2010	2:50:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:50:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:50:55 PM	Tube furnace set to 0
12/8/2010	2:51:55 PM	H2 valve closed
12/8/2010	2:51:55 PM	BCl3 valve closed
12/8/2010	2:51:55 PM	PH3 valve closed
12/8/2010	2:51:55 PM	SiCl4 pre valve closed
12/8/2010	2:51:55 PM	SiCl4 post valve closed
12/8/2010	2:51:55 PM	Bubbler valve closed
12/8/2010	2:51:55 PM	Helium valve opened
12/8/2010	2:51:55 PM	Main Vac valve opened
12/8/2010	2:51:55 PM	Bypass valve opened
12/8/2010	2:51:55 PM	Helium MFC set to  100.000000
12/8/2010	2:51:55 PM	H2 MFC set to  0.000000
12/8/2010	2:51:55 PM	BCl3 MFC set to  0.000000
12/8/2010	2:51:55 PM	PHl3 MFC set to  0.000000
12/8/2010	2:51:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:51:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:51:55 PM	Tube furnace set to 0
12/8/2010	2:52:55 PM	Helium valve closed
12/8/2010	2:52:55 PM	H2 valve closed
12/8/2010	2:52:55 PM	BCl3 valve closed
12/8/2010	2:52:55 PM	PH3 valve closed
12/8/2010	2:52:55 PM	SiCl4 pre valve closed
12/8/2010	2:52:55 PM	SiCl4 post valve closed
12/8/2010	2:52:55 PM	Bubbler valve closed
12/8/2010	2:52:55 PM	Main Vac valve opened
12/8/2010	2:52:55 PM	Bypass valve opened
12/8/2010	2:52:55 PM	Helium MFC set to  0.000000
12/8/2010	2:52:55 PM	H2 MFC set to  0.000000
12/8/2010	2:52:55 PM	BCl3 MFC set to  0.000000
12/8/2010	2:52:55 PM	PHl3 MFC set to  0.000000
12/8/2010	2:52:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:52:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:52:55 PM	Tube furnace set to 0
12/8/2010	2:53:55 PM	H2 valve closed
12/8/2010	2:53:55 PM	BCl3 valve closed
12/8/2010	2:53:55 PM	PH3 valve closed
12/8/2010	2:53:55 PM	SiCl4 pre valve closed
12/8/2010	2:53:55 PM	SiCl4 post valve closed
12/8/2010	2:53:55 PM	Bubbler valve closed
12/8/2010	2:53:55 PM	Helium valve opened
12/8/2010	2:53:55 PM	Main Vac valve opened
12/8/2010	2:53:55 PM	Bypass valve opened
12/8/2010	2:53:55 PM	Helium MFC set to  100.000000
12/8/2010	2:53:55 PM	H2 MFC set to  0.000000
12/8/2010	2:53:55 PM	BCl3 MFC set to  0.000000
12/8/2010	2:53:55 PM	PHl3 MFC set to  0.000000
12/8/2010	2:53:55 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:53:55 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:53:55 PM	Tube furnace set to 0
12/8/2010	2:54:56 PM	Helium valve closed
12/8/2010	2:54:56 PM	H2 valve closed
12/8/2010	2:54:56 PM	BCl3 valve closed
12/8/2010	2:54:56 PM	PH3 valve closed
12/8/2010	2:54:56 PM	SiCl4 pre valve closed
12/8/2010	2:54:56 PM	SiCl4 post valve closed
12/8/2010	2:54:56 PM	Bubbler valve closed
12/8/2010	2:54:56 PM	Main Vac valve opened
12/8/2010	2:54:56 PM	Bypass valve opened
12/8/2010	2:54:56 PM	Helium MFC set to  0.000000
12/8/2010	2:54:56 PM	H2 MFC set to  0.000000
12/8/2010	2:54:56 PM	BCl3 MFC set to  0.000000
12/8/2010	2:54:56 PM	PHl3 MFC set to  0.000000
12/8/2010	2:54:56 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:54:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:54:56 PM	Tube furnace set to 0
12/8/2010	2:55:56 PM	H2 valve closed
12/8/2010	2:55:56 PM	BCl3 valve closed
12/8/2010	2:55:56 PM	PH3 valve closed
12/8/2010	2:55:56 PM	SiCl4 pre valve closed
12/8/2010	2:55:56 PM	SiCl4 post valve closed
12/8/2010	2:55:56 PM	Bubbler valve closed
12/8/2010	2:55:56 PM	Helium valve opened
12/8/2010	2:55:56 PM	Main Vac valve opened
12/8/2010	2:55:56 PM	Bypass valve opened
12/8/2010	2:55:56 PM	Helium MFC set to  100.000000
12/8/2010	2:55:56 PM	H2 MFC set to  0.000000
12/8/2010	2:55:56 PM	BCl3 MFC set to  0.000000
12/8/2010	2:55:56 PM	PHl3 MFC set to  0.000000
12/8/2010	2:55:56 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:55:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:55:56 PM	Tube furnace set to 0
12/8/2010	2:56:56 PM	Helium valve closed
12/8/2010	2:56:56 PM	H2 valve closed
12/8/2010	2:56:56 PM	BCl3 valve closed
12/8/2010	2:56:56 PM	PH3 valve closed
12/8/2010	2:56:56 PM	SiCl4 pre valve closed
12/8/2010	2:56:56 PM	SiCl4 post valve closed
12/8/2010	2:56:56 PM	Bubbler valve closed
12/8/2010	2:56:56 PM	Main Vac valve opened
12/8/2010	2:56:56 PM	Bypass valve opened
12/8/2010	2:56:56 PM	Helium MFC set to  0.000000
12/8/2010	2:56:56 PM	H2 MFC set to  0.000000
12/8/2010	2:56:56 PM	BCl3 MFC set to  0.000000
12/8/2010	2:56:56 PM	PHl3 MFC set to  0.000000
12/8/2010	2:56:56 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:56:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:56:56 PM	Tube furnace set to 0
12/8/2010	2:57:56 PM	H2 valve closed
12/8/2010	2:57:56 PM	BCl3 valve closed
12/8/2010	2:57:56 PM	PH3 valve closed
12/8/2010	2:57:56 PM	SiCl4 pre valve closed
12/8/2010	2:57:56 PM	SiCl4 post valve closed
12/8/2010	2:57:56 PM	Bubbler valve closed
12/8/2010	2:57:56 PM	Helium valve opened
12/8/2010	2:57:56 PM	Main Vac valve opened
12/8/2010	2:57:56 PM	Bypass valve opened
12/8/2010	2:57:56 PM	Helium MFC set to  100.000000
12/8/2010	2:57:56 PM	H2 MFC set to  0.000000
12/8/2010	2:57:56 PM	BCl3 MFC set to  0.000000
12/8/2010	2:57:56 PM	PHl3 MFC set to  0.000000
12/8/2010	2:57:56 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:57:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:57:56 PM	Tube furnace set to 0
12/8/2010	2:58:56 PM	Helium valve closed
12/8/2010	2:58:56 PM	H2 valve closed
12/8/2010	2:58:56 PM	BCl3 valve closed
12/8/2010	2:58:56 PM	PH3 valve closed
12/8/2010	2:58:56 PM	SiCl4 pre valve closed
12/8/2010	2:58:56 PM	SiCl4 post valve closed
12/8/2010	2:58:56 PM	Bubbler valve closed
12/8/2010	2:58:56 PM	Main Vac valve opened
12/8/2010	2:58:56 PM	Bypass valve opened
12/8/2010	2:58:56 PM	Helium MFC set to  0.000000
12/8/2010	2:58:56 PM	H2 MFC set to  0.000000
12/8/2010	2:58:56 PM	BCl3 MFC set to  0.000000
12/8/2010	2:58:56 PM	PHl3 MFC set to  0.000000
12/8/2010	2:58:56 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:58:56 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:58:56 PM	Tube furnace set to 0
12/8/2010	2:59:56 PM	H2 valve closed
12/8/2010	2:59:56 PM	BCl3 valve closed
12/8/2010	2:59:56 PM	PH3 valve closed
12/8/2010	2:59:56 PM	SiCl4 pre valve closed
12/8/2010	2:59:56 PM	SiCl4 post valve closed
12/8/2010	2:59:56 PM	Bubbler valve closed
12/8/2010	2:59:56 PM	Helium valve opened
12/8/2010	2:59:56 PM	Main Vac valve opened
12/8/2010	2:59:56 PM	Bypass valve opened
12/8/2010	2:59:56 PM	Helium MFC set to  100.000000
12/8/2010	2:59:56 PM	H2 MFC set to  0.000000
12/8/2010	2:59:56 PM	BCl3 MFC set to  0.000000
12/8/2010	2:59:57 PM	PHl3 MFC set to  0.000000
12/8/2010	2:59:57 PM	SiCl4 MFC set to  0.000000
12/8/2010	2:59:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	2:59:57 PM	Tube furnace set to 0
12/8/2010	3:00:57 PM	Helium valve closed
12/8/2010	3:00:57 PM	H2 valve closed
12/8/2010	3:00:57 PM	BCl3 valve closed
12/8/2010	3:00:57 PM	PH3 valve closed
12/8/2010	3:00:57 PM	SiCl4 pre valve closed
12/8/2010	3:00:57 PM	SiCl4 post valve closed
12/8/2010	3:00:57 PM	Bubbler valve closed
12/8/2010	3:00:57 PM	Main Vac valve opened
12/8/2010	3:00:57 PM	Bypass valve opened
12/8/2010	3:00:57 PM	Helium MFC set to  0.000000
12/8/2010	3:00:57 PM	H2 MFC set to  0.000000
12/8/2010	3:00:57 PM	BCl3 MFC set to  0.000000
12/8/2010	3:00:57 PM	PHl3 MFC set to  0.000000
12/8/2010	3:00:57 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:00:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:00:57 PM	Tube furnace set to 0
12/8/2010	3:01:57 PM	H2 valve closed
12/8/2010	3:01:57 PM	BCl3 valve closed
12/8/2010	3:01:57 PM	PH3 valve closed
12/8/2010	3:01:57 PM	SiCl4 pre valve closed
12/8/2010	3:01:57 PM	SiCl4 post valve closed
12/8/2010	3:01:57 PM	Bubbler valve closed
12/8/2010	3:01:57 PM	Helium valve opened
12/8/2010	3:01:57 PM	Main Vac valve opened
12/8/2010	3:01:57 PM	Bypass valve opened
12/8/2010	3:01:57 PM	Helium MFC set to  100.000000
12/8/2010	3:01:57 PM	H2 MFC set to  0.000000
12/8/2010	3:01:57 PM	BCl3 MFC set to  0.000000
12/8/2010	3:01:57 PM	PHl3 MFC set to  0.000000
12/8/2010	3:01:57 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:01:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:01:57 PM	Tube furnace set to 0
12/8/2010	3:02:57 PM	Helium valve closed
12/8/2010	3:02:57 PM	H2 valve closed
12/8/2010	3:02:57 PM	BCl3 valve closed
12/8/2010	3:02:57 PM	PH3 valve closed
12/8/2010	3:02:57 PM	SiCl4 pre valve closed
12/8/2010	3:02:57 PM	SiCl4 post valve closed
12/8/2010	3:02:57 PM	Bubbler valve closed
12/8/2010	3:02:57 PM	Main Vac valve opened
12/8/2010	3:02:57 PM	Bypass valve opened
12/8/2010	3:02:57 PM	Helium MFC set to  0.000000
12/8/2010	3:02:57 PM	H2 MFC set to  0.000000
12/8/2010	3:02:57 PM	BCl3 MFC set to  0.000000
12/8/2010	3:02:57 PM	PHl3 MFC set to  0.000000
12/8/2010	3:02:57 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:02:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:02:57 PM	Tube furnace set to 0
12/8/2010	3:03:57 PM	H2 valve closed
12/8/2010	3:03:57 PM	BCl3 valve closed
12/8/2010	3:03:57 PM	PH3 valve closed
12/8/2010	3:03:57 PM	SiCl4 pre valve closed
12/8/2010	3:03:57 PM	SiCl4 post valve closed
12/8/2010	3:03:57 PM	Bubbler valve closed
12/8/2010	3:03:57 PM	Helium valve opened
12/8/2010	3:03:57 PM	Main Vac valve opened
12/8/2010	3:03:57 PM	Bypass valve opened
12/8/2010	3:03:57 PM	Helium MFC set to  100.000000
12/8/2010	3:03:57 PM	H2 MFC set to  0.000000
12/8/2010	3:03:57 PM	BCl3 MFC set to  0.000000
12/8/2010	3:03:57 PM	PHl3 MFC set to  0.000000
12/8/2010	3:03:57 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:03:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:03:57 PM	Tube furnace set to 0
12/8/2010	3:04:57 PM	Helium valve closed
12/8/2010	3:04:57 PM	H2 valve closed
12/8/2010	3:04:57 PM	BCl3 valve closed
12/8/2010	3:04:57 PM	PH3 valve closed
12/8/2010	3:04:57 PM	SiCl4 pre valve closed
12/8/2010	3:04:57 PM	SiCl4 post valve closed
12/8/2010	3:04:57 PM	Bubbler valve closed
12/8/2010	3:04:57 PM	Main Vac valve opened
12/8/2010	3:04:57 PM	Bypass valve opened
12/8/2010	3:04:57 PM	Helium MFC set to  0.000000
12/8/2010	3:04:58 PM	H2 MFC set to  0.000000
12/8/2010	3:04:58 PM	BCl3 MFC set to  0.000000
12/8/2010	3:04:58 PM	PHl3 MFC set to  0.000000
12/8/2010	3:04:58 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:04:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:04:58 PM	Tube furnace set to 0
12/8/2010	3:05:58 PM	H2 valve closed
12/8/2010	3:05:58 PM	BCl3 valve closed
12/8/2010	3:05:58 PM	PH3 valve closed
12/8/2010	3:05:58 PM	SiCl4 pre valve closed
12/8/2010	3:05:58 PM	SiCl4 post valve closed
12/8/2010	3:05:58 PM	Bubbler valve closed
12/8/2010	3:05:58 PM	Helium valve opened
12/8/2010	3:05:58 PM	Main Vac valve opened
12/8/2010	3:05:58 PM	Bypass valve opened
12/8/2010	3:05:58 PM	Helium MFC set to  100.000000
12/8/2010	3:05:58 PM	H2 MFC set to  0.000000
12/8/2010	3:05:58 PM	BCl3 MFC set to  0.000000
12/8/2010	3:05:58 PM	PHl3 MFC set to  0.000000
12/8/2010	3:05:58 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:05:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:05:58 PM	Tube furnace set to 0
12/8/2010	3:06:58 PM	Helium valve closed
12/8/2010	3:06:58 PM	H2 valve closed
12/8/2010	3:06:58 PM	BCl3 valve closed
12/8/2010	3:06:58 PM	PH3 valve closed
12/8/2010	3:06:58 PM	SiCl4 pre valve closed
12/8/2010	3:06:58 PM	SiCl4 post valve closed
12/8/2010	3:06:58 PM	Bubbler valve closed
12/8/2010	3:06:58 PM	Main Vac valve opened
12/8/2010	3:06:58 PM	Bypass valve opened
12/8/2010	3:06:58 PM	Helium MFC set to  0.000000
12/8/2010	3:06:58 PM	H2 MFC set to  0.000000
12/8/2010	3:06:58 PM	BCl3 MFC set to  0.000000
12/8/2010	3:06:58 PM	PHl3 MFC set to  0.000000
12/8/2010	3:06:58 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:06:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:06:58 PM	Tube furnace set to 0
12/8/2010	3:06:59 PM	Run finished at 3:06 PM
12/8/2010	3:06:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	3:12:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	3:12:57 PM	Recipe started at 3:12 PM
12/8/2010	3:12:57 PM	Helium valve closed
12/8/2010	3:12:57 PM	H2 valve closed
12/8/2010	3:12:57 PM	BCl3 valve closed
12/8/2010	3:12:57 PM	PH3 valve closed
12/8/2010	3:12:57 PM	SiCl4 pre valve closed
12/8/2010	3:12:57 PM	SiCl4 post valve closed
12/8/2010	3:12:57 PM	Main Vac valve closed
12/8/2010	3:12:57 PM	Bubbler valve closed
12/8/2010	3:12:57 PM	Bypass valve opened
12/8/2010	3:12:57 PM	Helium MFC set to  0.000000
12/8/2010	3:12:57 PM	H2 MFC set to  0.000000
12/8/2010	3:12:57 PM	BCl3 MFC set to  0.000000
12/8/2010	3:12:57 PM	PHl3 MFC set to  0.000000
12/8/2010	3:12:57 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:12:57 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:12:58 PM	Tube furnace set to 0
12/8/2010	3:12:58 PM	Helium valve closed
12/8/2010	3:12:58 PM	H2 valve closed
12/8/2010	3:12:58 PM	BCl3 valve closed
12/8/2010	3:12:58 PM	PH3 valve closed
12/8/2010	3:12:58 PM	SiCl4 pre valve closed
12/8/2010	3:12:58 PM	SiCl4 post valve closed
12/8/2010	3:12:58 PM	Bubbler valve closed
12/8/2010	3:12:58 PM	Main Vac valve opened
12/8/2010	3:12:58 PM	Bypass valve opened
12/8/2010	3:12:58 PM	Helium MFC set to  0.000000
12/8/2010	3:12:58 PM	H2 MFC set to  0.000000
12/8/2010	3:12:58 PM	BCl3 MFC set to  0.000000
12/8/2010	3:12:58 PM	PHl3 MFC set to  0.000000
12/8/2010	3:12:58 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:12:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:12:58 PM	Tube furnace set to 0
12/8/2010	3:13:58 PM	H2 valve closed
12/8/2010	3:13:58 PM	BCl3 valve closed
12/8/2010	3:13:58 PM	PH3 valve closed
12/8/2010	3:13:58 PM	SiCl4 pre valve closed
12/8/2010	3:13:58 PM	SiCl4 post valve closed
12/8/2010	3:13:58 PM	Bubbler valve closed
12/8/2010	3:13:58 PM	Helium valve opened
12/8/2010	3:13:58 PM	Main Vac valve opened
12/8/2010	3:13:58 PM	Bypass valve opened
12/8/2010	3:13:58 PM	Helium MFC set to  100.000000
12/8/2010	3:13:58 PM	H2 MFC set to  0.000000
12/8/2010	3:13:58 PM	BCl3 MFC set to  0.000000
12/8/2010	3:13:58 PM	PHl3 MFC set to  0.000000
12/8/2010	3:13:58 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:13:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:13:58 PM	Tube furnace set to 0
12/8/2010	3:14:58 PM	Helium valve closed
12/8/2010	3:14:58 PM	H2 valve closed
12/8/2010	3:14:58 PM	BCl3 valve closed
12/8/2010	3:14:58 PM	PH3 valve closed
12/8/2010	3:14:58 PM	SiCl4 pre valve closed
12/8/2010	3:14:58 PM	SiCl4 post valve closed
12/8/2010	3:14:58 PM	Bubbler valve closed
12/8/2010	3:14:58 PM	Main Vac valve opened
12/8/2010	3:14:58 PM	Bypass valve opened
12/8/2010	3:14:58 PM	Helium MFC set to  0.000000
12/8/2010	3:14:58 PM	H2 MFC set to  0.000000
12/8/2010	3:14:58 PM	BCl3 MFC set to  0.000000
12/8/2010	3:14:58 PM	PHl3 MFC set to  0.000000
12/8/2010	3:14:58 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:14:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:14:58 PM	Tube furnace set to 0
12/8/2010	3:15:58 PM	H2 valve closed
12/8/2010	3:15:58 PM	BCl3 valve closed
12/8/2010	3:15:58 PM	PH3 valve closed
12/8/2010	3:15:58 PM	SiCl4 pre valve closed
12/8/2010	3:15:58 PM	SiCl4 post valve closed
12/8/2010	3:15:58 PM	Bubbler valve closed
12/8/2010	3:15:58 PM	Helium valve opened
12/8/2010	3:15:58 PM	Main Vac valve opened
12/8/2010	3:15:58 PM	Bypass valve opened
12/8/2010	3:15:58 PM	Helium MFC set to  100.000000
12/8/2010	3:15:58 PM	H2 MFC set to  0.000000
12/8/2010	3:15:58 PM	BCl3 MFC set to  0.000000
12/8/2010	3:15:58 PM	PHl3 MFC set to  0.000000
12/8/2010	3:15:58 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:15:58 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:15:59 PM	Tube furnace set to 0
12/8/2010	3:16:59 PM	Helium valve closed
12/8/2010	3:16:59 PM	H2 valve closed
12/8/2010	3:16:59 PM	BCl3 valve closed
12/8/2010	3:16:59 PM	PH3 valve closed
12/8/2010	3:16:59 PM	SiCl4 pre valve closed
12/8/2010	3:16:59 PM	SiCl4 post valve closed
12/8/2010	3:16:59 PM	Bubbler valve closed
12/8/2010	3:16:59 PM	Main Vac valve opened
12/8/2010	3:16:59 PM	Bypass valve opened
12/8/2010	3:16:59 PM	Helium MFC set to  0.000000
12/8/2010	3:16:59 PM	H2 MFC set to  0.000000
12/8/2010	3:16:59 PM	BCl3 MFC set to  0.000000
12/8/2010	3:16:59 PM	PHl3 MFC set to  0.000000
12/8/2010	3:16:59 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:16:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:16:59 PM	Tube furnace set to 0
12/8/2010	3:17:59 PM	H2 valve closed
12/8/2010	3:17:59 PM	BCl3 valve closed
12/8/2010	3:17:59 PM	PH3 valve closed
12/8/2010	3:17:59 PM	SiCl4 pre valve closed
12/8/2010	3:17:59 PM	SiCl4 post valve closed
12/8/2010	3:17:59 PM	Bubbler valve closed
12/8/2010	3:17:59 PM	Helium valve opened
12/8/2010	3:17:59 PM	Main Vac valve opened
12/8/2010	3:17:59 PM	Bypass valve opened
12/8/2010	3:17:59 PM	Helium MFC set to  100.000000
12/8/2010	3:17:59 PM	H2 MFC set to  0.000000
12/8/2010	3:17:59 PM	BCl3 MFC set to  0.000000
12/8/2010	3:17:59 PM	PHl3 MFC set to  0.000000
12/8/2010	3:17:59 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:17:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:17:59 PM	Tube furnace set to 0
12/8/2010	3:18:59 PM	Helium valve closed
12/8/2010	3:18:59 PM	H2 valve closed
12/8/2010	3:18:59 PM	BCl3 valve closed
12/8/2010	3:18:59 PM	PH3 valve closed
12/8/2010	3:18:59 PM	SiCl4 pre valve closed
12/8/2010	3:18:59 PM	SiCl4 post valve closed
12/8/2010	3:18:59 PM	Bubbler valve closed
12/8/2010	3:18:59 PM	Main Vac valve opened
12/8/2010	3:18:59 PM	Bypass valve opened
12/8/2010	3:18:59 PM	Helium MFC set to  0.000000
12/8/2010	3:18:59 PM	H2 MFC set to  0.000000
12/8/2010	3:18:59 PM	BCl3 MFC set to  0.000000
12/8/2010	3:18:59 PM	PHl3 MFC set to  0.000000
12/8/2010	3:18:59 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:18:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:18:59 PM	Tube furnace set to 0
12/8/2010	3:19:59 PM	H2 valve closed
12/8/2010	3:19:59 PM	BCl3 valve closed
12/8/2010	3:19:59 PM	PH3 valve closed
12/8/2010	3:19:59 PM	SiCl4 pre valve closed
12/8/2010	3:19:59 PM	SiCl4 post valve closed
12/8/2010	3:19:59 PM	Bubbler valve closed
12/8/2010	3:19:59 PM	Helium valve opened
12/8/2010	3:19:59 PM	Main Vac valve opened
12/8/2010	3:19:59 PM	Bypass valve opened
12/8/2010	3:19:59 PM	Helium MFC set to  100.000000
12/8/2010	3:19:59 PM	H2 MFC set to  0.000000
12/8/2010	3:19:59 PM	BCl3 MFC set to  0.000000
12/8/2010	3:19:59 PM	PHl3 MFC set to  0.000000
12/8/2010	3:19:59 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:19:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:19:59 PM	Tube furnace set to 0
12/8/2010	3:20:59 PM	Helium valve closed
12/8/2010	3:20:59 PM	H2 valve closed
12/8/2010	3:20:59 PM	BCl3 valve closed
12/8/2010	3:20:59 PM	PH3 valve closed
12/8/2010	3:20:59 PM	SiCl4 pre valve closed
12/8/2010	3:20:59 PM	SiCl4 post valve closed
12/8/2010	3:20:59 PM	Bubbler valve closed
12/8/2010	3:20:59 PM	Main Vac valve opened
12/8/2010	3:20:59 PM	Bypass valve opened
12/8/2010	3:20:59 PM	Helium MFC set to  0.000000
12/8/2010	3:20:59 PM	H2 MFC set to  0.000000
12/8/2010	3:20:59 PM	BCl3 MFC set to  0.000000
12/8/2010	3:20:59 PM	PHl3 MFC set to  0.000000
12/8/2010	3:20:59 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:20:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:21:00 PM	Tube furnace set to 0
12/8/2010	3:22:00 PM	H2 valve closed
12/8/2010	3:22:00 PM	BCl3 valve closed
12/8/2010	3:22:00 PM	PH3 valve closed
12/8/2010	3:22:00 PM	SiCl4 pre valve closed
12/8/2010	3:22:00 PM	SiCl4 post valve closed
12/8/2010	3:22:00 PM	Bubbler valve closed
12/8/2010	3:22:00 PM	Helium valve opened
12/8/2010	3:22:00 PM	Main Vac valve opened
12/8/2010	3:22:00 PM	Bypass valve opened
12/8/2010	3:22:00 PM	Helium MFC set to  100.000000
12/8/2010	3:22:00 PM	H2 MFC set to  0.000000
12/8/2010	3:22:00 PM	BCl3 MFC set to  0.000000
12/8/2010	3:22:00 PM	PHl3 MFC set to  0.000000
12/8/2010	3:22:00 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:22:00 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:22:00 PM	Tube furnace set to 0
12/8/2010	3:23:00 PM	Helium valve closed
12/8/2010	3:23:00 PM	H2 valve closed
12/8/2010	3:23:00 PM	BCl3 valve closed
12/8/2010	3:23:00 PM	PH3 valve closed
12/8/2010	3:23:00 PM	SiCl4 pre valve closed
12/8/2010	3:23:00 PM	SiCl4 post valve closed
12/8/2010	3:23:00 PM	Bubbler valve closed
12/8/2010	3:23:00 PM	Main Vac valve opened
12/8/2010	3:23:00 PM	Bypass valve opened
12/8/2010	3:23:00 PM	Helium MFC set to  0.000000
12/8/2010	3:23:00 PM	H2 MFC set to  0.000000
12/8/2010	3:23:00 PM	BCl3 MFC set to  0.000000
12/8/2010	3:23:00 PM	PHl3 MFC set to  0.000000
12/8/2010	3:23:00 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:23:00 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:23:00 PM	Tube furnace set to 0
12/8/2010	3:24:00 PM	H2 valve closed
12/8/2010	3:24:00 PM	BCl3 valve closed
12/8/2010	3:24:00 PM	PH3 valve closed
12/8/2010	3:24:00 PM	SiCl4 pre valve closed
12/8/2010	3:24:00 PM	SiCl4 post valve closed
12/8/2010	3:24:00 PM	Bubbler valve closed
12/8/2010	3:24:00 PM	Helium valve opened
12/8/2010	3:24:00 PM	Main Vac valve opened
12/8/2010	3:24:00 PM	Bypass valve opened
12/8/2010	3:24:00 PM	Helium MFC set to  100.000000
12/8/2010	3:24:00 PM	H2 MFC set to  0.000000
12/8/2010	3:24:00 PM	BCl3 MFC set to  0.000000
12/8/2010	3:24:00 PM	PHl3 MFC set to  0.000000
12/8/2010	3:24:00 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:24:00 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:24:00 PM	Tube furnace set to 0
12/8/2010	3:25:00 PM	Helium valve closed
12/8/2010	3:25:00 PM	H2 valve closed
12/8/2010	3:25:00 PM	BCl3 valve closed
12/8/2010	3:25:00 PM	PH3 valve closed
12/8/2010	3:25:00 PM	SiCl4 pre valve closed
12/8/2010	3:25:00 PM	SiCl4 post valve closed
12/8/2010	3:25:00 PM	Bubbler valve closed
12/8/2010	3:25:00 PM	Main Vac valve opened
12/8/2010	3:25:00 PM	Bypass valve opened
12/8/2010	3:25:00 PM	Helium MFC set to  0.000000
12/8/2010	3:25:00 PM	H2 MFC set to  0.000000
12/8/2010	3:25:00 PM	BCl3 MFC set to  0.000000
12/8/2010	3:25:00 PM	PHl3 MFC set to  0.000000
12/8/2010	3:25:00 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:25:00 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:25:00 PM	Tube furnace set to 0
12/8/2010	3:26:00 PM	H2 valve closed
12/8/2010	3:26:00 PM	BCl3 valve closed
12/8/2010	3:26:00 PM	PH3 valve closed
12/8/2010	3:26:00 PM	SiCl4 pre valve closed
12/8/2010	3:26:00 PM	SiCl4 post valve closed
12/8/2010	3:26:00 PM	Bubbler valve closed
12/8/2010	3:26:00 PM	Helium valve opened
12/8/2010	3:26:00 PM	Main Vac valve opened
12/8/2010	3:26:00 PM	Bypass valve opened
12/8/2010	3:26:00 PM	Helium MFC set to  100.000000
12/8/2010	3:26:00 PM	H2 MFC set to  0.000000
12/8/2010	3:26:00 PM	BCl3 MFC set to  0.000000
12/8/2010	3:26:00 PM	PHl3 MFC set to  0.000000
12/8/2010	3:26:00 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:26:00 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:26:01 PM	Tube furnace set to 0
12/8/2010	3:27:01 PM	Helium valve closed
12/8/2010	3:27:01 PM	H2 valve closed
12/8/2010	3:27:01 PM	BCl3 valve closed
12/8/2010	3:27:01 PM	PH3 valve closed
12/8/2010	3:27:01 PM	SiCl4 pre valve closed
12/8/2010	3:27:01 PM	SiCl4 post valve closed
12/8/2010	3:27:01 PM	Bubbler valve closed
12/8/2010	3:27:01 PM	Main Vac valve opened
12/8/2010	3:27:01 PM	Bypass valve opened
12/8/2010	3:27:01 PM	Helium MFC set to  0.000000
12/8/2010	3:27:01 PM	H2 MFC set to  0.000000
12/8/2010	3:27:01 PM	BCl3 MFC set to  0.000000
12/8/2010	3:27:01 PM	PHl3 MFC set to  0.000000
12/8/2010	3:27:01 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:27:01 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:27:01 PM	Tube furnace set to 0
12/8/2010	3:28:01 PM	H2 valve closed
12/8/2010	3:28:01 PM	BCl3 valve closed
12/8/2010	3:28:01 PM	PH3 valve closed
12/8/2010	3:28:01 PM	SiCl4 pre valve closed
12/8/2010	3:28:01 PM	SiCl4 post valve closed
12/8/2010	3:28:01 PM	Bubbler valve closed
12/8/2010	3:28:01 PM	Helium valve opened
12/8/2010	3:28:01 PM	Main Vac valve opened
12/8/2010	3:28:01 PM	Bypass valve opened
12/8/2010	3:28:01 PM	Helium MFC set to  100.000000
12/8/2010	3:28:01 PM	H2 MFC set to  0.000000
12/8/2010	3:28:01 PM	BCl3 MFC set to  0.000000
12/8/2010	3:28:01 PM	PHl3 MFC set to  0.000000
12/8/2010	3:28:01 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:28:01 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:28:01 PM	Tube furnace set to 0
12/8/2010	3:29:01 PM	Helium valve closed
12/8/2010	3:29:01 PM	H2 valve closed
12/8/2010	3:29:01 PM	BCl3 valve closed
12/8/2010	3:29:01 PM	PH3 valve closed
12/8/2010	3:29:01 PM	SiCl4 pre valve closed
12/8/2010	3:29:01 PM	SiCl4 post valve closed
12/8/2010	3:29:01 PM	Bubbler valve closed
12/8/2010	3:29:01 PM	Main Vac valve opened
12/8/2010	3:29:01 PM	Bypass valve opened
12/8/2010	3:29:01 PM	Helium MFC set to  0.000000
12/8/2010	3:29:01 PM	H2 MFC set to  0.000000
12/8/2010	3:29:01 PM	BCl3 MFC set to  0.000000
12/8/2010	3:29:01 PM	PHl3 MFC set to  0.000000
12/8/2010	3:29:01 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:29:01 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:29:01 PM	Tube furnace set to 0
12/8/2010	3:30:01 PM	H2 valve closed
12/8/2010	3:30:01 PM	BCl3 valve closed
12/8/2010	3:30:01 PM	PH3 valve closed
12/8/2010	3:30:01 PM	SiCl4 pre valve closed
12/8/2010	3:30:01 PM	SiCl4 post valve closed
12/8/2010	3:30:01 PM	Bubbler valve closed
12/8/2010	3:30:01 PM	Helium valve opened
12/8/2010	3:30:01 PM	Main Vac valve opened
12/8/2010	3:30:01 PM	Bypass valve opened
12/8/2010	3:30:01 PM	Helium MFC set to  100.000000
12/8/2010	3:30:01 PM	H2 MFC set to  0.000000
12/8/2010	3:30:01 PM	BCl3 MFC set to  0.000000
12/8/2010	3:30:01 PM	PHl3 MFC set to  0.000000
12/8/2010	3:30:01 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:30:01 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:30:01 PM	Tube furnace set to 0
12/8/2010	3:31:01 PM	Helium valve closed
12/8/2010	3:31:01 PM	H2 valve closed
12/8/2010	3:31:01 PM	BCl3 valve closed
12/8/2010	3:31:01 PM	PH3 valve closed
12/8/2010	3:31:01 PM	SiCl4 pre valve closed
12/8/2010	3:31:01 PM	SiCl4 post valve closed
12/8/2010	3:31:01 PM	Bubbler valve closed
12/8/2010	3:31:01 PM	Main Vac valve opened
12/8/2010	3:31:01 PM	Bypass valve opened
12/8/2010	3:31:01 PM	Helium MFC set to  0.000000
12/8/2010	3:31:01 PM	H2 MFC set to  0.000000
12/8/2010	3:31:01 PM	BCl3 MFC set to  0.000000
12/8/2010	3:31:01 PM	PHl3 MFC set to  0.000000
12/8/2010	3:31:01 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:31:01 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:31:02 PM	Tube furnace set to 0
12/8/2010	3:32:02 PM	H2 valve closed
12/8/2010	3:32:02 PM	BCl3 valve closed
12/8/2010	3:32:02 PM	PH3 valve closed
12/8/2010	3:32:02 PM	SiCl4 pre valve closed
12/8/2010	3:32:02 PM	SiCl4 post valve closed
12/8/2010	3:32:02 PM	Bubbler valve closed
12/8/2010	3:32:02 PM	Helium valve opened
12/8/2010	3:32:02 PM	Main Vac valve opened
12/8/2010	3:32:02 PM	Bypass valve opened
12/8/2010	3:32:02 PM	Helium MFC set to  100.000000
12/8/2010	3:32:02 PM	H2 MFC set to  0.000000
12/8/2010	3:32:02 PM	BCl3 MFC set to  0.000000
12/8/2010	3:32:02 PM	PHl3 MFC set to  0.000000
12/8/2010	3:32:02 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:32:02 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:32:02 PM	Tube furnace set to 0
12/8/2010	3:33:02 PM	Helium valve closed
12/8/2010	3:33:02 PM	H2 valve closed
12/8/2010	3:33:02 PM	BCl3 valve closed
12/8/2010	3:33:02 PM	PH3 valve closed
12/8/2010	3:33:02 PM	SiCl4 pre valve closed
12/8/2010	3:33:02 PM	SiCl4 post valve closed
12/8/2010	3:33:02 PM	Bubbler valve closed
12/8/2010	3:33:02 PM	Main Vac valve opened
12/8/2010	3:33:02 PM	Bypass valve opened
12/8/2010	3:33:02 PM	Helium MFC set to  0.000000
12/8/2010	3:33:02 PM	H2 MFC set to  0.000000
12/8/2010	3:33:02 PM	BCl3 MFC set to  0.000000
12/8/2010	3:33:02 PM	PHl3 MFC set to  0.000000
12/8/2010	3:33:02 PM	SiCl4 MFC set to  0.000000
12/8/2010	3:33:02 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	3:33:02 PM	Tube furnace set to 0
12/8/2010	3:33:03 PM	Run finished at 3:33 PM
12/8/2010	3:33:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	5:22:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2010	5:22:37 PM	Recipe started at 5:22 PM
12/8/2010	5:22:37 PM	H2 valve closed
12/8/2010	5:22:37 PM	BCl3 valve closed
12/8/2010	5:22:37 PM	PH3 valve closed
12/8/2010	5:22:37 PM	SiCl4 pre valve closed
12/8/2010	5:22:37 PM	SiCl4 post valve closed
12/8/2010	5:22:37 PM	Main Vac valve closed
12/8/2010	5:22:37 PM	Bypass valve closed
12/8/2010	5:22:37 PM	Bubbler valve closed
12/8/2010	5:22:37 PM	Helium valve opened
12/8/2010	5:22:37 PM	Helium MFC set to  500.000000
12/8/2010	5:22:37 PM	H2 MFC set to  0.000000
12/8/2010	5:22:37 PM	BCl3 MFC set to  0.000000
12/8/2010	5:22:37 PM	PHl3 MFC set to  0.000000
12/8/2010	5:22:37 PM	SiCl4 MFC set to  0.000000
12/8/2010	5:22:37 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	5:22:37 PM	Tube furnace set to 0
12/8/2010	5:23:59 PM	Helium valve closed
12/8/2010	5:23:59 PM	H2 valve closed
12/8/2010	5:23:59 PM	BCl3 valve closed
12/8/2010	5:23:59 PM	PH3 valve closed
12/8/2010	5:23:59 PM	SiCl4 pre valve closed
12/8/2010	5:23:59 PM	SiCl4 post valve closed
12/8/2010	5:23:59 PM	Main Vac valve closed
12/8/2010	5:23:59 PM	Bypass valve closed
12/8/2010	5:23:59 PM	Bubbler valve closed
12/8/2010	5:23:59 PM	Helium MFC set to  0.000000
12/8/2010	5:23:59 PM	H2 MFC set to  0.000000
12/8/2010	5:23:59 PM	BCl3 MFC set to  0.000000
12/8/2010	5:23:59 PM	PHl3 MFC set to  0.000000
12/8/2010	5:23:59 PM	SiCl4 MFC set to  0.000000
12/8/2010	5:23:59 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	5:23:59 PM	Tube furnace set to 0
12/8/2010	5:23:59 PM	Run finished at 5:23 PM
12/8/2010	5:23:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/8/2010	5:51:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2010	5:51:22 PM	Recipe started at 5:51 PM
12/8/2010	5:51:22 PM	Helium valve closed
12/8/2010	5:51:22 PM	H2 valve closed
12/8/2010	5:51:22 PM	BCl3 valve closed
12/8/2010	5:51:22 PM	PH3 valve closed
12/8/2010	5:51:22 PM	SiCl4 pre valve closed
12/8/2010	5:51:22 PM	SiCl4 post valve closed
12/8/2010	5:51:22 PM	Main Vac valve closed
12/8/2010	5:51:22 PM	Bubbler valve closed
12/8/2010	5:51:22 PM	Bypass valve opened
12/8/2010	5:51:22 PM	Helium MFC set to  0.000000
12/8/2010	5:51:22 PM	H2 MFC set to  0.000000
12/8/2010	5:51:22 PM	BCl3 MFC set to  0.000000
12/8/2010	5:51:22 PM	PHl3 MFC set to  0.000000
12/8/2010	5:51:22 PM	SiCl4 MFC set to  0.000000
12/8/2010	5:51:22 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	5:51:22 PM	Tube furnace set to 0
12/8/2010	5:52:18 PM	Helium valve closed
12/8/2010	5:52:18 PM	H2 valve closed
12/8/2010	5:52:18 PM	BCl3 valve closed
12/8/2010	5:52:18 PM	PH3 valve closed
12/8/2010	5:52:18 PM	SiCl4 pre valve closed
12/8/2010	5:52:18 PM	SiCl4 post valve closed
12/8/2010	5:52:18 PM	Bubbler valve closed
12/8/2010	5:52:18 PM	Main Vac valve opened
12/8/2010	5:52:18 PM	Bypass valve opened
12/8/2010	5:52:18 PM	Helium MFC set to  0.000000
12/8/2010	5:52:18 PM	H2 MFC set to  0.000000
12/8/2010	5:52:18 PM	BCl3 MFC set to  0.000000
12/8/2010	5:52:18 PM	PHl3 MFC set to  0.000000
12/8/2010	5:52:18 PM	SiCl4 MFC set to  0.000000
12/8/2010	5:52:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	5:52:19 PM	Tube furnace set to 0
12/8/2010	5:52:19 PM	Run finished at 5:52 PM
12/8/2010	5:52:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/8/2010	6:00:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	6:00:45 PM	Recipe started at 6:00 PM
12/8/2010	6:00:45 PM	Helium valve closed
12/8/2010	6:00:45 PM	H2 valve closed
12/8/2010	6:00:45 PM	BCl3 valve closed
12/8/2010	6:00:45 PM	PH3 valve closed
12/8/2010	6:00:45 PM	SiCl4 pre valve closed
12/8/2010	6:00:45 PM	SiCl4 post valve closed
12/8/2010	6:00:45 PM	Main Vac valve closed
12/8/2010	6:00:45 PM	Bubbler valve closed
12/8/2010	6:00:45 PM	Bypass valve opened
12/8/2010	6:00:45 PM	Helium MFC set to  0.000000
12/8/2010	6:00:45 PM	H2 MFC set to  0.000000
12/8/2010	6:00:45 PM	BCl3 MFC set to  0.000000
12/8/2010	6:00:45 PM	PHl3 MFC set to  0.000000
12/8/2010	6:00:45 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:00:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:00:45 PM	Tube furnace set to 0
12/8/2010	6:00:45 PM	Helium valve closed
12/8/2010	6:00:45 PM	H2 valve closed
12/8/2010	6:00:45 PM	BCl3 valve closed
12/8/2010	6:00:45 PM	PH3 valve closed
12/8/2010	6:00:45 PM	SiCl4 pre valve closed
12/8/2010	6:00:45 PM	SiCl4 post valve closed
12/8/2010	6:00:45 PM	Bubbler valve closed
12/8/2010	6:00:45 PM	Main Vac valve opened
12/8/2010	6:00:45 PM	Bypass valve opened
12/8/2010	6:00:45 PM	Helium MFC set to  0.000000
12/8/2010	6:00:45 PM	H2 MFC set to  0.000000
12/8/2010	6:00:45 PM	BCl3 MFC set to  0.000000
12/8/2010	6:00:45 PM	PHl3 MFC set to  0.000000
12/8/2010	6:00:45 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:00:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:00:45 PM	Tube furnace set to 0
12/8/2010	6:01:45 PM	H2 valve closed
12/8/2010	6:01:45 PM	BCl3 valve closed
12/8/2010	6:01:45 PM	PH3 valve closed
12/8/2010	6:01:45 PM	SiCl4 pre valve closed
12/8/2010	6:01:45 PM	SiCl4 post valve closed
12/8/2010	6:01:45 PM	Bubbler valve closed
12/8/2010	6:01:45 PM	Helium valve opened
12/8/2010	6:01:45 PM	Main Vac valve opened
12/8/2010	6:01:45 PM	Bypass valve opened
12/8/2010	6:01:45 PM	Helium MFC set to  100.000000
12/8/2010	6:01:45 PM	H2 MFC set to  0.000000
12/8/2010	6:01:45 PM	BCl3 MFC set to  0.000000
12/8/2010	6:01:45 PM	PHl3 MFC set to  0.000000
12/8/2010	6:01:45 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:01:45 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:01:46 PM	Tube furnace set to 0
12/8/2010	6:02:46 PM	Helium valve closed
12/8/2010	6:02:46 PM	H2 valve closed
12/8/2010	6:02:46 PM	BCl3 valve closed
12/8/2010	6:02:46 PM	PH3 valve closed
12/8/2010	6:02:46 PM	SiCl4 pre valve closed
12/8/2010	6:02:46 PM	SiCl4 post valve closed
12/8/2010	6:02:46 PM	Bubbler valve closed
12/8/2010	6:02:46 PM	Main Vac valve opened
12/8/2010	6:02:46 PM	Bypass valve opened
12/8/2010	6:02:46 PM	Helium MFC set to  0.000000
12/8/2010	6:02:46 PM	H2 MFC set to  0.000000
12/8/2010	6:02:46 PM	BCl3 MFC set to  0.000000
12/8/2010	6:02:46 PM	PHl3 MFC set to  0.000000
12/8/2010	6:02:46 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:02:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:02:46 PM	Tube furnace set to 0
12/8/2010	6:03:46 PM	H2 valve closed
12/8/2010	6:03:46 PM	BCl3 valve closed
12/8/2010	6:03:46 PM	PH3 valve closed
12/8/2010	6:03:46 PM	SiCl4 pre valve closed
12/8/2010	6:03:46 PM	SiCl4 post valve closed
12/8/2010	6:03:46 PM	Bubbler valve closed
12/8/2010	6:03:46 PM	Helium valve opened
12/8/2010	6:03:46 PM	Main Vac valve opened
12/8/2010	6:03:46 PM	Bypass valve opened
12/8/2010	6:03:46 PM	Helium MFC set to  100.000000
12/8/2010	6:03:46 PM	H2 MFC set to  0.000000
12/8/2010	6:03:46 PM	BCl3 MFC set to  0.000000
12/8/2010	6:03:46 PM	PHl3 MFC set to  0.000000
12/8/2010	6:03:46 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:03:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:03:46 PM	Tube furnace set to 0
12/8/2010	6:04:46 PM	Helium valve closed
12/8/2010	6:04:46 PM	H2 valve closed
12/8/2010	6:04:46 PM	BCl3 valve closed
12/8/2010	6:04:46 PM	PH3 valve closed
12/8/2010	6:04:46 PM	SiCl4 pre valve closed
12/8/2010	6:04:46 PM	SiCl4 post valve closed
12/8/2010	6:04:46 PM	Bubbler valve closed
12/8/2010	6:04:46 PM	Main Vac valve opened
12/8/2010	6:04:46 PM	Bypass valve opened
12/8/2010	6:04:46 PM	Helium MFC set to  0.000000
12/8/2010	6:04:46 PM	H2 MFC set to  0.000000
12/8/2010	6:04:46 PM	BCl3 MFC set to  0.000000
12/8/2010	6:04:46 PM	PHl3 MFC set to  0.000000
12/8/2010	6:04:46 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:04:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:04:46 PM	Tube furnace set to 0
12/8/2010	6:05:46 PM	H2 valve closed
12/8/2010	6:05:46 PM	BCl3 valve closed
12/8/2010	6:05:46 PM	PH3 valve closed
12/8/2010	6:05:46 PM	SiCl4 pre valve closed
12/8/2010	6:05:46 PM	SiCl4 post valve closed
12/8/2010	6:05:46 PM	Bubbler valve closed
12/8/2010	6:05:46 PM	Helium valve opened
12/8/2010	6:05:46 PM	Main Vac valve opened
12/8/2010	6:05:46 PM	Bypass valve opened
12/8/2010	6:05:46 PM	Helium MFC set to  100.000000
12/8/2010	6:05:46 PM	H2 MFC set to  0.000000
12/8/2010	6:05:46 PM	BCl3 MFC set to  0.000000
12/8/2010	6:05:46 PM	PHl3 MFC set to  0.000000
12/8/2010	6:05:46 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:05:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:05:46 PM	Tube furnace set to 0
12/8/2010	6:06:46 PM	Helium valve closed
12/8/2010	6:06:46 PM	H2 valve closed
12/8/2010	6:06:46 PM	BCl3 valve closed
12/8/2010	6:06:46 PM	PH3 valve closed
12/8/2010	6:06:46 PM	SiCl4 pre valve closed
12/8/2010	6:06:46 PM	SiCl4 post valve closed
12/8/2010	6:06:46 PM	Bubbler valve closed
12/8/2010	6:06:46 PM	Main Vac valve opened
12/8/2010	6:06:46 PM	Bypass valve opened
12/8/2010	6:06:46 PM	Helium MFC set to  0.000000
12/8/2010	6:06:46 PM	H2 MFC set to  0.000000
12/8/2010	6:06:46 PM	BCl3 MFC set to  0.000000
12/8/2010	6:06:46 PM	PHl3 MFC set to  0.000000
12/8/2010	6:06:46 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:06:46 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:06:47 PM	Tube furnace set to 0
12/8/2010	6:07:47 PM	H2 valve closed
12/8/2010	6:07:47 PM	BCl3 valve closed
12/8/2010	6:07:47 PM	PH3 valve closed
12/8/2010	6:07:47 PM	SiCl4 pre valve closed
12/8/2010	6:07:47 PM	SiCl4 post valve closed
12/8/2010	6:07:47 PM	Bubbler valve closed
12/8/2010	6:07:47 PM	Helium valve opened
12/8/2010	6:07:47 PM	Main Vac valve opened
12/8/2010	6:07:47 PM	Bypass valve opened
12/8/2010	6:07:47 PM	Helium MFC set to  100.000000
12/8/2010	6:07:47 PM	H2 MFC set to  0.000000
12/8/2010	6:07:47 PM	BCl3 MFC set to  0.000000
12/8/2010	6:07:47 PM	PHl3 MFC set to  0.000000
12/8/2010	6:07:47 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:07:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:07:47 PM	Tube furnace set to 0
12/8/2010	6:08:47 PM	Helium valve closed
12/8/2010	6:08:47 PM	H2 valve closed
12/8/2010	6:08:47 PM	BCl3 valve closed
12/8/2010	6:08:47 PM	PH3 valve closed
12/8/2010	6:08:47 PM	SiCl4 pre valve closed
12/8/2010	6:08:47 PM	SiCl4 post valve closed
12/8/2010	6:08:47 PM	Bubbler valve closed
12/8/2010	6:08:47 PM	Main Vac valve opened
12/8/2010	6:08:47 PM	Bypass valve opened
12/8/2010	6:08:47 PM	Helium MFC set to  0.000000
12/8/2010	6:08:47 PM	H2 MFC set to  0.000000
12/8/2010	6:08:47 PM	BCl3 MFC set to  0.000000
12/8/2010	6:08:47 PM	PHl3 MFC set to  0.000000
12/8/2010	6:08:47 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:08:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:08:47 PM	Tube furnace set to 0
12/8/2010	6:09:47 PM	H2 valve closed
12/8/2010	6:09:47 PM	BCl3 valve closed
12/8/2010	6:09:47 PM	PH3 valve closed
12/8/2010	6:09:47 PM	SiCl4 pre valve closed
12/8/2010	6:09:47 PM	SiCl4 post valve closed
12/8/2010	6:09:47 PM	Bubbler valve closed
12/8/2010	6:09:47 PM	Helium valve opened
12/8/2010	6:09:47 PM	Main Vac valve opened
12/8/2010	6:09:47 PM	Bypass valve opened
12/8/2010	6:09:47 PM	Helium MFC set to  100.000000
12/8/2010	6:09:47 PM	H2 MFC set to  0.000000
12/8/2010	6:09:47 PM	BCl3 MFC set to  0.000000
12/8/2010	6:09:47 PM	PHl3 MFC set to  0.000000
12/8/2010	6:09:47 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:09:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:09:47 PM	Tube furnace set to 0
12/8/2010	6:10:47 PM	Helium valve closed
12/8/2010	6:10:47 PM	H2 valve closed
12/8/2010	6:10:47 PM	BCl3 valve closed
12/8/2010	6:10:47 PM	PH3 valve closed
12/8/2010	6:10:47 PM	SiCl4 pre valve closed
12/8/2010	6:10:47 PM	SiCl4 post valve closed
12/8/2010	6:10:47 PM	Bubbler valve closed
12/8/2010	6:10:47 PM	Main Vac valve opened
12/8/2010	6:10:47 PM	Bypass valve opened
12/8/2010	6:10:47 PM	Helium MFC set to  0.000000
12/8/2010	6:10:47 PM	H2 MFC set to  0.000000
12/8/2010	6:10:47 PM	BCl3 MFC set to  0.000000
12/8/2010	6:10:47 PM	PHl3 MFC set to  0.000000
12/8/2010	6:10:47 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:10:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:10:47 PM	Tube furnace set to 0
12/8/2010	6:11:47 PM	H2 valve closed
12/8/2010	6:11:47 PM	BCl3 valve closed
12/8/2010	6:11:47 PM	PH3 valve closed
12/8/2010	6:11:47 PM	SiCl4 pre valve closed
12/8/2010	6:11:47 PM	SiCl4 post valve closed
12/8/2010	6:11:47 PM	Bubbler valve closed
12/8/2010	6:11:47 PM	Helium valve opened
12/8/2010	6:11:47 PM	Main Vac valve opened
12/8/2010	6:11:47 PM	Bypass valve opened
12/8/2010	6:11:47 PM	Helium MFC set to  100.000000
12/8/2010	6:11:47 PM	H2 MFC set to  0.000000
12/8/2010	6:11:47 PM	BCl3 MFC set to  0.000000
12/8/2010	6:11:47 PM	PHl3 MFC set to  0.000000
12/8/2010	6:11:47 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:11:47 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:11:48 PM	Tube furnace set to 0
12/8/2010	6:12:48 PM	Helium valve closed
12/8/2010	6:12:48 PM	H2 valve closed
12/8/2010	6:12:48 PM	BCl3 valve closed
12/8/2010	6:12:48 PM	PH3 valve closed
12/8/2010	6:12:48 PM	SiCl4 pre valve closed
12/8/2010	6:12:48 PM	SiCl4 post valve closed
12/8/2010	6:12:48 PM	Bubbler valve closed
12/8/2010	6:12:48 PM	Main Vac valve opened
12/8/2010	6:12:48 PM	Bypass valve opened
12/8/2010	6:12:48 PM	Helium MFC set to  0.000000
12/8/2010	6:12:48 PM	H2 MFC set to  0.000000
12/8/2010	6:12:48 PM	BCl3 MFC set to  0.000000
12/8/2010	6:12:48 PM	PHl3 MFC set to  0.000000
12/8/2010	6:12:48 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:12:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:12:48 PM	Tube furnace set to 0
12/8/2010	6:13:48 PM	H2 valve closed
12/8/2010	6:13:48 PM	BCl3 valve closed
12/8/2010	6:13:48 PM	PH3 valve closed
12/8/2010	6:13:48 PM	SiCl4 pre valve closed
12/8/2010	6:13:48 PM	SiCl4 post valve closed
12/8/2010	6:13:48 PM	Bubbler valve closed
12/8/2010	6:13:48 PM	Helium valve opened
12/8/2010	6:13:48 PM	Main Vac valve opened
12/8/2010	6:13:48 PM	Bypass valve opened
12/8/2010	6:13:48 PM	Helium MFC set to  100.000000
12/8/2010	6:13:48 PM	H2 MFC set to  0.000000
12/8/2010	6:13:48 PM	BCl3 MFC set to  0.000000
12/8/2010	6:13:48 PM	PHl3 MFC set to  0.000000
12/8/2010	6:13:48 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:13:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:13:48 PM	Tube furnace set to 0
12/8/2010	6:14:48 PM	Helium valve closed
12/8/2010	6:14:48 PM	H2 valve closed
12/8/2010	6:14:48 PM	BCl3 valve closed
12/8/2010	6:14:48 PM	PH3 valve closed
12/8/2010	6:14:48 PM	SiCl4 pre valve closed
12/8/2010	6:14:48 PM	SiCl4 post valve closed
12/8/2010	6:14:48 PM	Bubbler valve closed
12/8/2010	6:14:48 PM	Main Vac valve opened
12/8/2010	6:14:48 PM	Bypass valve opened
12/8/2010	6:14:48 PM	Helium MFC set to  0.000000
12/8/2010	6:14:48 PM	H2 MFC set to  0.000000
12/8/2010	6:14:48 PM	BCl3 MFC set to  0.000000
12/8/2010	6:14:48 PM	PHl3 MFC set to  0.000000
12/8/2010	6:14:48 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:14:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:14:48 PM	Tube furnace set to 0
12/8/2010	6:15:48 PM	H2 valve closed
12/8/2010	6:15:48 PM	BCl3 valve closed
12/8/2010	6:15:48 PM	PH3 valve closed
12/8/2010	6:15:48 PM	SiCl4 pre valve closed
12/8/2010	6:15:48 PM	SiCl4 post valve closed
12/8/2010	6:15:48 PM	Bubbler valve closed
12/8/2010	6:15:48 PM	Helium valve opened
12/8/2010	6:15:48 PM	Main Vac valve opened
12/8/2010	6:15:48 PM	Bypass valve opened
12/8/2010	6:15:48 PM	Helium MFC set to  100.000000
12/8/2010	6:15:48 PM	H2 MFC set to  0.000000
12/8/2010	6:15:48 PM	BCl3 MFC set to  0.000000
12/8/2010	6:15:48 PM	PHl3 MFC set to  0.000000
12/8/2010	6:15:48 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:15:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:15:48 PM	Tube furnace set to 0
12/8/2010	6:16:48 PM	Helium valve closed
12/8/2010	6:16:48 PM	H2 valve closed
12/8/2010	6:16:48 PM	BCl3 valve closed
12/8/2010	6:16:48 PM	PH3 valve closed
12/8/2010	6:16:48 PM	SiCl4 pre valve closed
12/8/2010	6:16:48 PM	SiCl4 post valve closed
12/8/2010	6:16:48 PM	Bubbler valve closed
12/8/2010	6:16:48 PM	Main Vac valve opened
12/8/2010	6:16:48 PM	Bypass valve opened
12/8/2010	6:16:48 PM	Helium MFC set to  0.000000
12/8/2010	6:16:48 PM	H2 MFC set to  0.000000
12/8/2010	6:16:48 PM	BCl3 MFC set to  0.000000
12/8/2010	6:16:48 PM	PHl3 MFC set to  0.000000
12/8/2010	6:16:48 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:16:48 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:16:49 PM	Tube furnace set to 0
12/8/2010	6:17:49 PM	H2 valve closed
12/8/2010	6:17:49 PM	BCl3 valve closed
12/8/2010	6:17:49 PM	PH3 valve closed
12/8/2010	6:17:49 PM	SiCl4 pre valve closed
12/8/2010	6:17:49 PM	SiCl4 post valve closed
12/8/2010	6:17:49 PM	Bubbler valve closed
12/8/2010	6:17:49 PM	Helium valve opened
12/8/2010	6:17:49 PM	Main Vac valve opened
12/8/2010	6:17:49 PM	Bypass valve opened
12/8/2010	6:17:49 PM	Helium MFC set to  100.000000
12/8/2010	6:17:49 PM	H2 MFC set to  0.000000
12/8/2010	6:17:49 PM	BCl3 MFC set to  0.000000
12/8/2010	6:17:49 PM	PHl3 MFC set to  0.000000
12/8/2010	6:17:49 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:17:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:17:49 PM	Tube furnace set to 0
12/8/2010	6:18:49 PM	Helium valve closed
12/8/2010	6:18:49 PM	H2 valve closed
12/8/2010	6:18:49 PM	BCl3 valve closed
12/8/2010	6:18:49 PM	PH3 valve closed
12/8/2010	6:18:49 PM	SiCl4 pre valve closed
12/8/2010	6:18:49 PM	SiCl4 post valve closed
12/8/2010	6:18:49 PM	Bubbler valve closed
12/8/2010	6:18:49 PM	Main Vac valve opened
12/8/2010	6:18:49 PM	Bypass valve opened
12/8/2010	6:18:49 PM	Helium MFC set to  0.000000
12/8/2010	6:18:49 PM	H2 MFC set to  0.000000
12/8/2010	6:18:49 PM	BCl3 MFC set to  0.000000
12/8/2010	6:18:49 PM	PHl3 MFC set to  0.000000
12/8/2010	6:18:49 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:18:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:18:49 PM	Tube furnace set to 0
12/8/2010	6:19:49 PM	H2 valve closed
12/8/2010	6:19:49 PM	BCl3 valve closed
12/8/2010	6:19:49 PM	PH3 valve closed
12/8/2010	6:19:49 PM	SiCl4 pre valve closed
12/8/2010	6:19:49 PM	SiCl4 post valve closed
12/8/2010	6:19:49 PM	Bubbler valve closed
12/8/2010	6:19:49 PM	Helium valve opened
12/8/2010	6:19:49 PM	Main Vac valve opened
12/8/2010	6:19:49 PM	Bypass valve opened
12/8/2010	6:19:49 PM	Helium MFC set to  100.000000
12/8/2010	6:19:49 PM	H2 MFC set to  0.000000
12/8/2010	6:19:49 PM	BCl3 MFC set to  0.000000
12/8/2010	6:19:49 PM	PHl3 MFC set to  0.000000
12/8/2010	6:19:49 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:19:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:19:49 PM	Tube furnace set to 0
12/8/2010	6:20:49 PM	Helium valve closed
12/8/2010	6:20:49 PM	H2 valve closed
12/8/2010	6:20:49 PM	BCl3 valve closed
12/8/2010	6:20:49 PM	PH3 valve closed
12/8/2010	6:20:49 PM	SiCl4 pre valve closed
12/8/2010	6:20:49 PM	SiCl4 post valve closed
12/8/2010	6:20:49 PM	Bubbler valve closed
12/8/2010	6:20:49 PM	Main Vac valve opened
12/8/2010	6:20:49 PM	Bypass valve opened
12/8/2010	6:20:49 PM	Helium MFC set to  0.000000
12/8/2010	6:20:49 PM	H2 MFC set to  0.000000
12/8/2010	6:20:49 PM	BCl3 MFC set to  0.000000
12/8/2010	6:20:49 PM	PHl3 MFC set to  0.000000
12/8/2010	6:20:49 PM	SiCl4 MFC set to  0.000000
12/8/2010	6:20:49 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	6:20:49 PM	Tube furnace set to 0
12/8/2010	6:20:50 PM	Run finished at 6:20 PM
12/8/2010	6:20:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	7:00:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	7:00:17 PM	Recipe started at 7:00 PM
12/8/2010	7:00:17 PM	Helium valve closed
12/8/2010	7:00:17 PM	H2 valve closed
12/8/2010	7:00:17 PM	BCl3 valve closed
12/8/2010	7:00:17 PM	PH3 valve closed
12/8/2010	7:00:17 PM	SiCl4 pre valve closed
12/8/2010	7:00:17 PM	SiCl4 post valve closed
12/8/2010	7:00:17 PM	Main Vac valve closed
12/8/2010	7:00:17 PM	Bubbler valve closed
12/8/2010	7:00:17 PM	Bypass valve opened
12/8/2010	7:00:17 PM	Helium MFC set to  0.000000
12/8/2010	7:00:17 PM	H2 MFC set to  0.000000
12/8/2010	7:00:17 PM	BCl3 MFC set to  0.000000
12/8/2010	7:00:17 PM	PHl3 MFC set to  0.000000
12/8/2010	7:00:17 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:00:17 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:00:17 PM	Tube furnace set to 0
12/8/2010	7:00:18 PM	Helium valve closed
12/8/2010	7:00:18 PM	H2 valve closed
12/8/2010	7:00:18 PM	BCl3 valve closed
12/8/2010	7:00:18 PM	PH3 valve closed
12/8/2010	7:00:18 PM	SiCl4 pre valve closed
12/8/2010	7:00:18 PM	SiCl4 post valve closed
12/8/2010	7:00:18 PM	Bubbler valve closed
12/8/2010	7:00:18 PM	Main Vac valve opened
12/8/2010	7:00:18 PM	Bypass valve opened
12/8/2010	7:00:18 PM	Helium MFC set to  0.000000
12/8/2010	7:00:18 PM	H2 MFC set to  0.000000
12/8/2010	7:00:18 PM	BCl3 MFC set to  0.000000
12/8/2010	7:00:18 PM	PHl3 MFC set to  0.000000
12/8/2010	7:00:18 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:00:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:00:18 PM	Tube furnace set to 0
12/8/2010	7:01:18 PM	H2 valve closed
12/8/2010	7:01:18 PM	BCl3 valve closed
12/8/2010	7:01:18 PM	PH3 valve closed
12/8/2010	7:01:18 PM	SiCl4 pre valve closed
12/8/2010	7:01:18 PM	SiCl4 post valve closed
12/8/2010	7:01:18 PM	Bubbler valve closed
12/8/2010	7:01:18 PM	Helium valve opened
12/8/2010	7:01:18 PM	Main Vac valve opened
12/8/2010	7:01:18 PM	Bypass valve opened
12/8/2010	7:01:18 PM	Helium MFC set to  100.000000
12/8/2010	7:01:18 PM	H2 MFC set to  0.000000
12/8/2010	7:01:18 PM	BCl3 MFC set to  0.000000
12/8/2010	7:01:18 PM	PHl3 MFC set to  0.000000
12/8/2010	7:01:18 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:01:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:01:18 PM	Tube furnace set to 0
12/8/2010	7:02:18 PM	Helium valve closed
12/8/2010	7:02:18 PM	H2 valve closed
12/8/2010	7:02:18 PM	BCl3 valve closed
12/8/2010	7:02:18 PM	PH3 valve closed
12/8/2010	7:02:18 PM	SiCl4 pre valve closed
12/8/2010	7:02:18 PM	SiCl4 post valve closed
12/8/2010	7:02:18 PM	Bubbler valve closed
12/8/2010	7:02:18 PM	Main Vac valve opened
12/8/2010	7:02:18 PM	Bypass valve opened
12/8/2010	7:02:18 PM	Helium MFC set to  0.000000
12/8/2010	7:02:18 PM	H2 MFC set to  0.000000
12/8/2010	7:02:18 PM	BCl3 MFC set to  0.000000
12/8/2010	7:02:18 PM	PHl3 MFC set to  0.000000
12/8/2010	7:02:18 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:02:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:02:18 PM	Tube furnace set to 0
12/8/2010	7:03:18 PM	H2 valve closed
12/8/2010	7:03:18 PM	BCl3 valve closed
12/8/2010	7:03:18 PM	PH3 valve closed
12/8/2010	7:03:18 PM	SiCl4 pre valve closed
12/8/2010	7:03:18 PM	SiCl4 post valve closed
12/8/2010	7:03:18 PM	Bubbler valve closed
12/8/2010	7:03:18 PM	Helium valve opened
12/8/2010	7:03:18 PM	Main Vac valve opened
12/8/2010	7:03:18 PM	Bypass valve opened
12/8/2010	7:03:18 PM	Helium MFC set to  100.000000
12/8/2010	7:03:18 PM	H2 MFC set to  0.000000
12/8/2010	7:03:18 PM	BCl3 MFC set to  0.000000
12/8/2010	7:03:18 PM	PHl3 MFC set to  0.000000
12/8/2010	7:03:18 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:03:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:03:18 PM	Tube furnace set to 0
12/8/2010	7:04:18 PM	Helium valve closed
12/8/2010	7:04:18 PM	H2 valve closed
12/8/2010	7:04:18 PM	BCl3 valve closed
12/8/2010	7:04:18 PM	PH3 valve closed
12/8/2010	7:04:18 PM	SiCl4 pre valve closed
12/8/2010	7:04:18 PM	SiCl4 post valve closed
12/8/2010	7:04:18 PM	Bubbler valve closed
12/8/2010	7:04:18 PM	Main Vac valve opened
12/8/2010	7:04:18 PM	Bypass valve opened
12/8/2010	7:04:18 PM	Helium MFC set to  0.000000
12/8/2010	7:04:18 PM	H2 MFC set to  0.000000
12/8/2010	7:04:18 PM	BCl3 MFC set to  0.000000
12/8/2010	7:04:18 PM	PHl3 MFC set to  0.000000
12/8/2010	7:04:18 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:04:18 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:04:19 PM	Tube furnace set to 0
12/8/2010	7:05:19 PM	H2 valve closed
12/8/2010	7:05:19 PM	BCl3 valve closed
12/8/2010	7:05:19 PM	PH3 valve closed
12/8/2010	7:05:19 PM	SiCl4 pre valve closed
12/8/2010	7:05:19 PM	SiCl4 post valve closed
12/8/2010	7:05:19 PM	Bubbler valve closed
12/8/2010	7:05:19 PM	Helium valve opened
12/8/2010	7:05:19 PM	Main Vac valve opened
12/8/2010	7:05:19 PM	Bypass valve opened
12/8/2010	7:05:19 PM	Helium MFC set to  100.000000
12/8/2010	7:05:19 PM	H2 MFC set to  0.000000
12/8/2010	7:05:19 PM	BCl3 MFC set to  0.000000
12/8/2010	7:05:19 PM	PHl3 MFC set to  0.000000
12/8/2010	7:05:19 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:05:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:05:19 PM	Tube furnace set to 0
12/8/2010	7:06:19 PM	Helium valve closed
12/8/2010	7:06:19 PM	H2 valve closed
12/8/2010	7:06:19 PM	BCl3 valve closed
12/8/2010	7:06:19 PM	PH3 valve closed
12/8/2010	7:06:19 PM	SiCl4 pre valve closed
12/8/2010	7:06:19 PM	SiCl4 post valve closed
12/8/2010	7:06:19 PM	Bubbler valve closed
12/8/2010	7:06:19 PM	Main Vac valve opened
12/8/2010	7:06:19 PM	Bypass valve opened
12/8/2010	7:06:19 PM	Helium MFC set to  0.000000
12/8/2010	7:06:19 PM	H2 MFC set to  0.000000
12/8/2010	7:06:19 PM	BCl3 MFC set to  0.000000
12/8/2010	7:06:19 PM	PHl3 MFC set to  0.000000
12/8/2010	7:06:19 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:06:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:06:19 PM	Tube furnace set to 0
12/8/2010	7:07:19 PM	H2 valve closed
12/8/2010	7:07:19 PM	BCl3 valve closed
12/8/2010	7:07:19 PM	PH3 valve closed
12/8/2010	7:07:19 PM	SiCl4 pre valve closed
12/8/2010	7:07:19 PM	SiCl4 post valve closed
12/8/2010	7:07:19 PM	Bubbler valve closed
12/8/2010	7:07:19 PM	Helium valve opened
12/8/2010	7:07:19 PM	Main Vac valve opened
12/8/2010	7:07:19 PM	Bypass valve opened
12/8/2010	7:07:19 PM	Helium MFC set to  100.000000
12/8/2010	7:07:19 PM	H2 MFC set to  0.000000
12/8/2010	7:07:19 PM	BCl3 MFC set to  0.000000
12/8/2010	7:07:19 PM	PHl3 MFC set to  0.000000
12/8/2010	7:07:19 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:07:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:07:19 PM	Tube furnace set to 0
12/8/2010	7:08:19 PM	Helium valve closed
12/8/2010	7:08:19 PM	H2 valve closed
12/8/2010	7:08:19 PM	BCl3 valve closed
12/8/2010	7:08:19 PM	PH3 valve closed
12/8/2010	7:08:19 PM	SiCl4 pre valve closed
12/8/2010	7:08:19 PM	SiCl4 post valve closed
12/8/2010	7:08:19 PM	Bubbler valve closed
12/8/2010	7:08:19 PM	Main Vac valve opened
12/8/2010	7:08:19 PM	Bypass valve opened
12/8/2010	7:08:19 PM	Helium MFC set to  0.000000
12/8/2010	7:08:19 PM	H2 MFC set to  0.000000
12/8/2010	7:08:19 PM	BCl3 MFC set to  0.000000
12/8/2010	7:08:19 PM	PHl3 MFC set to  0.000000
12/8/2010	7:08:19 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:08:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:08:19 PM	Tube furnace set to 0
12/8/2010	7:09:19 PM	H2 valve closed
12/8/2010	7:09:19 PM	BCl3 valve closed
12/8/2010	7:09:19 PM	PH3 valve closed
12/8/2010	7:09:19 PM	SiCl4 pre valve closed
12/8/2010	7:09:19 PM	SiCl4 post valve closed
12/8/2010	7:09:19 PM	Bubbler valve closed
12/8/2010	7:09:19 PM	Helium valve opened
12/8/2010	7:09:19 PM	Main Vac valve opened
12/8/2010	7:09:19 PM	Bypass valve opened
12/8/2010	7:09:19 PM	Helium MFC set to  100.000000
12/8/2010	7:09:19 PM	H2 MFC set to  0.000000
12/8/2010	7:09:19 PM	BCl3 MFC set to  0.000000
12/8/2010	7:09:19 PM	PHl3 MFC set to  0.000000
12/8/2010	7:09:19 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:09:19 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:09:20 PM	Tube furnace set to 0
12/8/2010	7:10:20 PM	Helium valve closed
12/8/2010	7:10:20 PM	H2 valve closed
12/8/2010	7:10:20 PM	BCl3 valve closed
12/8/2010	7:10:20 PM	PH3 valve closed
12/8/2010	7:10:20 PM	SiCl4 pre valve closed
12/8/2010	7:10:20 PM	SiCl4 post valve closed
12/8/2010	7:10:20 PM	Bubbler valve closed
12/8/2010	7:10:20 PM	Main Vac valve opened
12/8/2010	7:10:20 PM	Bypass valve opened
12/8/2010	7:10:20 PM	Helium MFC set to  0.000000
12/8/2010	7:10:20 PM	H2 MFC set to  0.000000
12/8/2010	7:10:20 PM	BCl3 MFC set to  0.000000
12/8/2010	7:10:20 PM	PHl3 MFC set to  0.000000
12/8/2010	7:10:20 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:10:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:10:20 PM	Tube furnace set to 0
12/8/2010	7:11:20 PM	H2 valve closed
12/8/2010	7:11:20 PM	BCl3 valve closed
12/8/2010	7:11:20 PM	PH3 valve closed
12/8/2010	7:11:20 PM	SiCl4 pre valve closed
12/8/2010	7:11:20 PM	SiCl4 post valve closed
12/8/2010	7:11:20 PM	Bubbler valve closed
12/8/2010	7:11:20 PM	Helium valve opened
12/8/2010	7:11:20 PM	Main Vac valve opened
12/8/2010	7:11:20 PM	Bypass valve opened
12/8/2010	7:11:20 PM	Helium MFC set to  100.000000
12/8/2010	7:11:20 PM	H2 MFC set to  0.000000
12/8/2010	7:11:20 PM	BCl3 MFC set to  0.000000
12/8/2010	7:11:20 PM	PHl3 MFC set to  0.000000
12/8/2010	7:11:20 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:11:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:11:20 PM	Tube furnace set to 0
12/8/2010	7:12:20 PM	Helium valve closed
12/8/2010	7:12:20 PM	H2 valve closed
12/8/2010	7:12:20 PM	BCl3 valve closed
12/8/2010	7:12:20 PM	PH3 valve closed
12/8/2010	7:12:20 PM	SiCl4 pre valve closed
12/8/2010	7:12:20 PM	SiCl4 post valve closed
12/8/2010	7:12:20 PM	Bubbler valve closed
12/8/2010	7:12:20 PM	Main Vac valve opened
12/8/2010	7:12:20 PM	Bypass valve opened
12/8/2010	7:12:20 PM	Helium MFC set to  0.000000
12/8/2010	7:12:20 PM	H2 MFC set to  0.000000
12/8/2010	7:12:20 PM	BCl3 MFC set to  0.000000
12/8/2010	7:12:20 PM	PHl3 MFC set to  0.000000
12/8/2010	7:12:20 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:12:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:12:20 PM	Tube furnace set to 0
12/8/2010	7:13:20 PM	H2 valve closed
12/8/2010	7:13:20 PM	BCl3 valve closed
12/8/2010	7:13:20 PM	PH3 valve closed
12/8/2010	7:13:20 PM	SiCl4 pre valve closed
12/8/2010	7:13:20 PM	SiCl4 post valve closed
12/8/2010	7:13:20 PM	Bubbler valve closed
12/8/2010	7:13:20 PM	Helium valve opened
12/8/2010	7:13:20 PM	Main Vac valve opened
12/8/2010	7:13:20 PM	Bypass valve opened
12/8/2010	7:13:20 PM	Helium MFC set to  100.000000
12/8/2010	7:13:20 PM	H2 MFC set to  0.000000
12/8/2010	7:13:20 PM	BCl3 MFC set to  0.000000
12/8/2010	7:13:20 PM	PHl3 MFC set to  0.000000
12/8/2010	7:13:20 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:13:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:13:20 PM	Tube furnace set to 0
12/8/2010	7:14:20 PM	Helium valve closed
12/8/2010	7:14:20 PM	H2 valve closed
12/8/2010	7:14:20 PM	BCl3 valve closed
12/8/2010	7:14:20 PM	PH3 valve closed
12/8/2010	7:14:20 PM	SiCl4 pre valve closed
12/8/2010	7:14:20 PM	SiCl4 post valve closed
12/8/2010	7:14:20 PM	Bubbler valve closed
12/8/2010	7:14:20 PM	Main Vac valve opened
12/8/2010	7:14:20 PM	Bypass valve opened
12/8/2010	7:14:20 PM	Helium MFC set to  0.000000
12/8/2010	7:14:20 PM	H2 MFC set to  0.000000
12/8/2010	7:14:20 PM	BCl3 MFC set to  0.000000
12/8/2010	7:14:20 PM	PHl3 MFC set to  0.000000
12/8/2010	7:14:20 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:14:20 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:14:21 PM	Tube furnace set to 0
12/8/2010	7:15:21 PM	H2 valve closed
12/8/2010	7:15:21 PM	BCl3 valve closed
12/8/2010	7:15:21 PM	PH3 valve closed
12/8/2010	7:15:21 PM	SiCl4 pre valve closed
12/8/2010	7:15:21 PM	SiCl4 post valve closed
12/8/2010	7:15:21 PM	Bubbler valve closed
12/8/2010	7:15:21 PM	Helium valve opened
12/8/2010	7:15:21 PM	Main Vac valve opened
12/8/2010	7:15:21 PM	Bypass valve opened
12/8/2010	7:15:21 PM	Helium MFC set to  100.000000
12/8/2010	7:15:21 PM	H2 MFC set to  0.000000
12/8/2010	7:15:21 PM	BCl3 MFC set to  0.000000
12/8/2010	7:15:21 PM	PHl3 MFC set to  0.000000
12/8/2010	7:15:21 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:15:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:15:21 PM	Tube furnace set to 0
12/8/2010	7:16:21 PM	Helium valve closed
12/8/2010	7:16:21 PM	H2 valve closed
12/8/2010	7:16:21 PM	BCl3 valve closed
12/8/2010	7:16:21 PM	PH3 valve closed
12/8/2010	7:16:21 PM	SiCl4 pre valve closed
12/8/2010	7:16:21 PM	SiCl4 post valve closed
12/8/2010	7:16:21 PM	Bubbler valve closed
12/8/2010	7:16:21 PM	Main Vac valve opened
12/8/2010	7:16:21 PM	Bypass valve opened
12/8/2010	7:16:21 PM	Helium MFC set to  0.000000
12/8/2010	7:16:21 PM	H2 MFC set to  0.000000
12/8/2010	7:16:21 PM	BCl3 MFC set to  0.000000
12/8/2010	7:16:21 PM	PHl3 MFC set to  0.000000
12/8/2010	7:16:21 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:16:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:16:21 PM	Tube furnace set to 0
12/8/2010	7:17:21 PM	H2 valve closed
12/8/2010	7:17:21 PM	BCl3 valve closed
12/8/2010	7:17:21 PM	PH3 valve closed
12/8/2010	7:17:21 PM	SiCl4 pre valve closed
12/8/2010	7:17:21 PM	SiCl4 post valve closed
12/8/2010	7:17:21 PM	Bubbler valve closed
12/8/2010	7:17:21 PM	Helium valve opened
12/8/2010	7:17:21 PM	Main Vac valve opened
12/8/2010	7:17:21 PM	Bypass valve opened
12/8/2010	7:17:21 PM	Helium MFC set to  100.000000
12/8/2010	7:17:21 PM	H2 MFC set to  0.000000
12/8/2010	7:17:21 PM	BCl3 MFC set to  0.000000
12/8/2010	7:17:21 PM	PHl3 MFC set to  0.000000
12/8/2010	7:17:21 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:17:21 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:17:21 PM	Tube furnace set to 0
12/8/2010	7:18:21 PM	Run aborted at 7:18 PM
12/8/2010	7:18:21 PM	Helium valve closed
12/8/2010	7:18:21 PM	H2 valve closed
12/8/2010	7:18:21 PM	BCl3 valve closed
12/8/2010	7:18:21 PM	PH3 valve closed
12/8/2010	7:18:21 PM	SiCl4 pre valve closed
12/8/2010	7:18:21 PM	SiCl4 post valve closed
12/8/2010	7:18:21 PM	Bypass valve closed
12/8/2010	7:18:21 PM	Main Vac valve closed
12/8/2010	7:18:21 PM	Bubbler valve closed
12/8/2010	7:18:21 PM	Helium MFC set to  0.000000
12/8/2010	7:18:21 PM	H2 MFC set to  0.000000
12/8/2010	7:18:21 PM	BCl3 MFC set to  0.000000
12/8/2010	7:18:21 PM	PHl3 MFC set to  0.000000
12/8/2010	7:18:21 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:18:21 PM	Tube furnace set to 0
12/8/2010	7:18:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	7:18:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/8/2010	7:18:39 PM	Recipe started at 7:18 PM
12/8/2010	7:18:39 PM	Helium valve closed
12/8/2010	7:18:39 PM	H2 valve closed
12/8/2010	7:18:39 PM	BCl3 valve closed
12/8/2010	7:18:39 PM	PH3 valve closed
12/8/2010	7:18:39 PM	SiCl4 pre valve closed
12/8/2010	7:18:39 PM	SiCl4 post valve closed
12/8/2010	7:18:39 PM	Main Vac valve closed
12/8/2010	7:18:39 PM	Bubbler valve closed
12/8/2010	7:18:39 PM	Bypass valve opened
12/8/2010	7:18:39 PM	Helium MFC set to  0.000000
12/8/2010	7:18:39 PM	H2 MFC set to  0.000000
12/8/2010	7:18:39 PM	BCl3 MFC set to  0.000000
12/8/2010	7:18:39 PM	PHl3 MFC set to  0.000000
12/8/2010	7:18:39 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:18:39 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:18:39 PM	Tube furnace set to 0
12/8/2010	7:18:39 PM	Helium valve closed
12/8/2010	7:18:39 PM	H2 valve closed
12/8/2010	7:18:39 PM	BCl3 valve closed
12/8/2010	7:18:39 PM	PH3 valve closed
12/8/2010	7:18:39 PM	SiCl4 pre valve closed
12/8/2010	7:18:39 PM	SiCl4 post valve closed
12/8/2010	7:18:39 PM	Bubbler valve closed
12/8/2010	7:18:39 PM	Main Vac valve opened
12/8/2010	7:18:39 PM	Bypass valve opened
12/8/2010	7:18:39 PM	Helium MFC set to  0.000000
12/8/2010	7:18:39 PM	H2 MFC set to  0.000000
12/8/2010	7:18:39 PM	BCl3 MFC set to  0.000000
12/8/2010	7:18:39 PM	PHl3 MFC set to  0.000000
12/8/2010	7:18:39 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:18:39 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:18:39 PM	Tube furnace set to 0
12/8/2010	7:19:39 PM	H2 valve closed
12/8/2010	7:19:39 PM	BCl3 valve closed
12/8/2010	7:19:39 PM	PH3 valve closed
12/8/2010	7:19:39 PM	SiCl4 pre valve closed
12/8/2010	7:19:39 PM	SiCl4 post valve closed
12/8/2010	7:19:39 PM	Bubbler valve closed
12/8/2010	7:19:39 PM	Helium valve opened
12/8/2010	7:19:39 PM	Main Vac valve opened
12/8/2010	7:19:39 PM	Bypass valve opened
12/8/2010	7:19:39 PM	Helium MFC set to  100.000000
12/8/2010	7:19:39 PM	H2 MFC set to  0.000000
12/8/2010	7:19:39 PM	BCl3 MFC set to  0.000000
12/8/2010	7:19:39 PM	PHl3 MFC set to  0.000000
12/8/2010	7:19:39 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:19:39 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:19:40 PM	Tube furnace set to 0
12/8/2010	7:20:40 PM	Helium valve closed
12/8/2010	7:20:40 PM	H2 valve closed
12/8/2010	7:20:40 PM	BCl3 valve closed
12/8/2010	7:20:40 PM	PH3 valve closed
12/8/2010	7:20:40 PM	SiCl4 pre valve closed
12/8/2010	7:20:40 PM	SiCl4 post valve closed
12/8/2010	7:20:40 PM	Bubbler valve closed
12/8/2010	7:20:40 PM	Main Vac valve opened
12/8/2010	7:20:40 PM	Bypass valve opened
12/8/2010	7:20:40 PM	Helium MFC set to  0.000000
12/8/2010	7:20:40 PM	H2 MFC set to  0.000000
12/8/2010	7:20:40 PM	BCl3 MFC set to  0.000000
12/8/2010	7:20:40 PM	PHl3 MFC set to  0.000000
12/8/2010	7:20:40 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:20:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:20:40 PM	Tube furnace set to 0
12/8/2010	7:21:40 PM	H2 valve closed
12/8/2010	7:21:40 PM	BCl3 valve closed
12/8/2010	7:21:40 PM	PH3 valve closed
12/8/2010	7:21:40 PM	SiCl4 pre valve closed
12/8/2010	7:21:40 PM	SiCl4 post valve closed
12/8/2010	7:21:40 PM	Bubbler valve closed
12/8/2010	7:21:40 PM	Helium valve opened
12/8/2010	7:21:40 PM	Main Vac valve opened
12/8/2010	7:21:40 PM	Bypass valve opened
12/8/2010	7:21:40 PM	Helium MFC set to  100.000000
12/8/2010	7:21:40 PM	H2 MFC set to  0.000000
12/8/2010	7:21:40 PM	BCl3 MFC set to  0.000000
12/8/2010	7:21:40 PM	PHl3 MFC set to  0.000000
12/8/2010	7:21:40 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:21:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:21:40 PM	Tube furnace set to 0
12/8/2010	7:22:40 PM	Helium valve closed
12/8/2010	7:22:40 PM	H2 valve closed
12/8/2010	7:22:40 PM	BCl3 valve closed
12/8/2010	7:22:40 PM	PH3 valve closed
12/8/2010	7:22:40 PM	SiCl4 pre valve closed
12/8/2010	7:22:40 PM	SiCl4 post valve closed
12/8/2010	7:22:40 PM	Bubbler valve closed
12/8/2010	7:22:40 PM	Main Vac valve opened
12/8/2010	7:22:40 PM	Bypass valve opened
12/8/2010	7:22:40 PM	Helium MFC set to  0.000000
12/8/2010	7:22:40 PM	H2 MFC set to  0.000000
12/8/2010	7:22:40 PM	BCl3 MFC set to  0.000000
12/8/2010	7:22:40 PM	PHl3 MFC set to  0.000000
12/8/2010	7:22:40 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:22:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:22:40 PM	Tube furnace set to 0
12/8/2010	7:23:40 PM	H2 valve closed
12/8/2010	7:23:40 PM	BCl3 valve closed
12/8/2010	7:23:40 PM	PH3 valve closed
12/8/2010	7:23:40 PM	SiCl4 pre valve closed
12/8/2010	7:23:40 PM	SiCl4 post valve closed
12/8/2010	7:23:40 PM	Bubbler valve closed
12/8/2010	7:23:40 PM	Helium valve opened
12/8/2010	7:23:40 PM	Main Vac valve opened
12/8/2010	7:23:40 PM	Bypass valve opened
12/8/2010	7:23:40 PM	Helium MFC set to  100.000000
12/8/2010	7:23:40 PM	H2 MFC set to  0.000000
12/8/2010	7:23:40 PM	BCl3 MFC set to  0.000000
12/8/2010	7:23:40 PM	PHl3 MFC set to  0.000000
12/8/2010	7:23:40 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:23:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:23:40 PM	Tube furnace set to 0
12/8/2010	7:24:40 PM	Helium valve closed
12/8/2010	7:24:40 PM	H2 valve closed
12/8/2010	7:24:40 PM	BCl3 valve closed
12/8/2010	7:24:40 PM	PH3 valve closed
12/8/2010	7:24:40 PM	SiCl4 pre valve closed
12/8/2010	7:24:40 PM	SiCl4 post valve closed
12/8/2010	7:24:40 PM	Bubbler valve closed
12/8/2010	7:24:40 PM	Main Vac valve opened
12/8/2010	7:24:40 PM	Bypass valve opened
12/8/2010	7:24:40 PM	Helium MFC set to  0.000000
12/8/2010	7:24:40 PM	H2 MFC set to  0.000000
12/8/2010	7:24:40 PM	BCl3 MFC set to  0.000000
12/8/2010	7:24:40 PM	PHl3 MFC set to  0.000000
12/8/2010	7:24:40 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:24:40 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:24:41 PM	Tube furnace set to 0
12/8/2010	7:25:41 PM	H2 valve closed
12/8/2010	7:25:41 PM	BCl3 valve closed
12/8/2010	7:25:41 PM	PH3 valve closed
12/8/2010	7:25:41 PM	SiCl4 pre valve closed
12/8/2010	7:25:41 PM	SiCl4 post valve closed
12/8/2010	7:25:41 PM	Bubbler valve closed
12/8/2010	7:25:41 PM	Helium valve opened
12/8/2010	7:25:41 PM	Main Vac valve opened
12/8/2010	7:25:41 PM	Bypass valve opened
12/8/2010	7:25:41 PM	Helium MFC set to  100.000000
12/8/2010	7:25:41 PM	H2 MFC set to  0.000000
12/8/2010	7:25:41 PM	BCl3 MFC set to  0.000000
12/8/2010	7:25:41 PM	PHl3 MFC set to  0.000000
12/8/2010	7:25:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:25:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:25:41 PM	Tube furnace set to 0
12/8/2010	7:26:41 PM	Helium valve closed
12/8/2010	7:26:41 PM	H2 valve closed
12/8/2010	7:26:41 PM	BCl3 valve closed
12/8/2010	7:26:41 PM	PH3 valve closed
12/8/2010	7:26:41 PM	SiCl4 pre valve closed
12/8/2010	7:26:41 PM	SiCl4 post valve closed
12/8/2010	7:26:41 PM	Bubbler valve closed
12/8/2010	7:26:41 PM	Main Vac valve opened
12/8/2010	7:26:41 PM	Bypass valve opened
12/8/2010	7:26:41 PM	Helium MFC set to  0.000000
12/8/2010	7:26:41 PM	H2 MFC set to  0.000000
12/8/2010	7:26:41 PM	BCl3 MFC set to  0.000000
12/8/2010	7:26:41 PM	PHl3 MFC set to  0.000000
12/8/2010	7:26:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:26:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:26:41 PM	Tube furnace set to 0
12/8/2010	7:27:41 PM	H2 valve closed
12/8/2010	7:27:41 PM	BCl3 valve closed
12/8/2010	7:27:41 PM	PH3 valve closed
12/8/2010	7:27:41 PM	SiCl4 pre valve closed
12/8/2010	7:27:41 PM	SiCl4 post valve closed
12/8/2010	7:27:41 PM	Bubbler valve closed
12/8/2010	7:27:41 PM	Helium valve opened
12/8/2010	7:27:41 PM	Main Vac valve opened
12/8/2010	7:27:41 PM	Bypass valve opened
12/8/2010	7:27:41 PM	Helium MFC set to  100.000000
12/8/2010	7:27:41 PM	H2 MFC set to  0.000000
12/8/2010	7:27:41 PM	BCl3 MFC set to  0.000000
12/8/2010	7:27:41 PM	PHl3 MFC set to  0.000000
12/8/2010	7:27:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:27:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:27:41 PM	Tube furnace set to 0
12/8/2010	7:28:41 PM	Helium valve closed
12/8/2010	7:28:41 PM	H2 valve closed
12/8/2010	7:28:41 PM	BCl3 valve closed
12/8/2010	7:28:41 PM	PH3 valve closed
12/8/2010	7:28:41 PM	SiCl4 pre valve closed
12/8/2010	7:28:41 PM	SiCl4 post valve closed
12/8/2010	7:28:41 PM	Bubbler valve closed
12/8/2010	7:28:41 PM	Main Vac valve opened
12/8/2010	7:28:41 PM	Bypass valve opened
12/8/2010	7:28:41 PM	Helium MFC set to  0.000000
12/8/2010	7:28:41 PM	H2 MFC set to  0.000000
12/8/2010	7:28:41 PM	BCl3 MFC set to  0.000000
12/8/2010	7:28:41 PM	PHl3 MFC set to  0.000000
12/8/2010	7:28:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:28:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:28:41 PM	Tube furnace set to 0
12/8/2010	7:29:41 PM	H2 valve closed
12/8/2010	7:29:41 PM	BCl3 valve closed
12/8/2010	7:29:41 PM	PH3 valve closed
12/8/2010	7:29:41 PM	SiCl4 pre valve closed
12/8/2010	7:29:41 PM	SiCl4 post valve closed
12/8/2010	7:29:41 PM	Bubbler valve closed
12/8/2010	7:29:41 PM	Helium valve opened
12/8/2010	7:29:41 PM	Main Vac valve opened
12/8/2010	7:29:41 PM	Bypass valve opened
12/8/2010	7:29:41 PM	Helium MFC set to  100.000000
12/8/2010	7:29:41 PM	H2 MFC set to  0.000000
12/8/2010	7:29:41 PM	BCl3 MFC set to  0.000000
12/8/2010	7:29:41 PM	PHl3 MFC set to  0.000000
12/8/2010	7:29:41 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:29:41 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:29:41 PM	Tube furnace set to 0
12/8/2010	7:30:42 PM	Helium valve closed
12/8/2010	7:30:42 PM	H2 valve closed
12/8/2010	7:30:42 PM	BCl3 valve closed
12/8/2010	7:30:42 PM	PH3 valve closed
12/8/2010	7:30:42 PM	SiCl4 pre valve closed
12/8/2010	7:30:42 PM	SiCl4 post valve closed
12/8/2010	7:30:42 PM	Bubbler valve closed
12/8/2010	7:30:42 PM	Main Vac valve opened
12/8/2010	7:30:42 PM	Bypass valve opened
12/8/2010	7:30:42 PM	Helium MFC set to  0.000000
12/8/2010	7:30:42 PM	H2 MFC set to  0.000000
12/8/2010	7:30:42 PM	BCl3 MFC set to  0.000000
12/8/2010	7:30:42 PM	PHl3 MFC set to  0.000000
12/8/2010	7:30:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:30:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:30:42 PM	Tube furnace set to 0
12/8/2010	7:31:42 PM	H2 valve closed
12/8/2010	7:31:42 PM	BCl3 valve closed
12/8/2010	7:31:42 PM	PH3 valve closed
12/8/2010	7:31:42 PM	SiCl4 pre valve closed
12/8/2010	7:31:42 PM	SiCl4 post valve closed
12/8/2010	7:31:42 PM	Bubbler valve closed
12/8/2010	7:31:42 PM	Helium valve opened
12/8/2010	7:31:42 PM	Main Vac valve opened
12/8/2010	7:31:42 PM	Bypass valve opened
12/8/2010	7:31:42 PM	Helium MFC set to  100.000000
12/8/2010	7:31:42 PM	H2 MFC set to  0.000000
12/8/2010	7:31:42 PM	BCl3 MFC set to  0.000000
12/8/2010	7:31:42 PM	PHl3 MFC set to  0.000000
12/8/2010	7:31:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:31:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:31:42 PM	Tube furnace set to 0
12/8/2010	7:32:42 PM	Helium valve closed
12/8/2010	7:32:42 PM	H2 valve closed
12/8/2010	7:32:42 PM	BCl3 valve closed
12/8/2010	7:32:42 PM	PH3 valve closed
12/8/2010	7:32:42 PM	SiCl4 pre valve closed
12/8/2010	7:32:42 PM	SiCl4 post valve closed
12/8/2010	7:32:42 PM	Bubbler valve closed
12/8/2010	7:32:42 PM	Main Vac valve opened
12/8/2010	7:32:42 PM	Bypass valve opened
12/8/2010	7:32:42 PM	Helium MFC set to  0.000000
12/8/2010	7:32:42 PM	H2 MFC set to  0.000000
12/8/2010	7:32:42 PM	BCl3 MFC set to  0.000000
12/8/2010	7:32:42 PM	PHl3 MFC set to  0.000000
12/8/2010	7:32:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:32:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:32:42 PM	Tube furnace set to 0
12/8/2010	7:33:42 PM	H2 valve closed
12/8/2010	7:33:42 PM	BCl3 valve closed
12/8/2010	7:33:42 PM	PH3 valve closed
12/8/2010	7:33:42 PM	SiCl4 pre valve closed
12/8/2010	7:33:42 PM	SiCl4 post valve closed
12/8/2010	7:33:42 PM	Bubbler valve closed
12/8/2010	7:33:42 PM	Helium valve opened
12/8/2010	7:33:42 PM	Main Vac valve opened
12/8/2010	7:33:42 PM	Bypass valve opened
12/8/2010	7:33:42 PM	Helium MFC set to  100.000000
12/8/2010	7:33:42 PM	H2 MFC set to  0.000000
12/8/2010	7:33:42 PM	BCl3 MFC set to  0.000000
12/8/2010	7:33:42 PM	PHl3 MFC set to  0.000000
12/8/2010	7:33:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:33:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:33:42 PM	Tube furnace set to 0
12/8/2010	7:34:42 PM	Helium valve closed
12/8/2010	7:34:42 PM	H2 valve closed
12/8/2010	7:34:42 PM	BCl3 valve closed
12/8/2010	7:34:42 PM	PH3 valve closed
12/8/2010	7:34:42 PM	SiCl4 pre valve closed
12/8/2010	7:34:42 PM	SiCl4 post valve closed
12/8/2010	7:34:42 PM	Bubbler valve closed
12/8/2010	7:34:42 PM	Main Vac valve opened
12/8/2010	7:34:42 PM	Bypass valve opened
12/8/2010	7:34:42 PM	Helium MFC set to  0.000000
12/8/2010	7:34:42 PM	H2 MFC set to  0.000000
12/8/2010	7:34:42 PM	BCl3 MFC set to  0.000000
12/8/2010	7:34:42 PM	PHl3 MFC set to  0.000000
12/8/2010	7:34:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:34:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:34:42 PM	Tube furnace set to 0
12/8/2010	7:35:42 PM	H2 valve closed
12/8/2010	7:35:42 PM	BCl3 valve closed
12/8/2010	7:35:42 PM	PH3 valve closed
12/8/2010	7:35:42 PM	SiCl4 pre valve closed
12/8/2010	7:35:42 PM	SiCl4 post valve closed
12/8/2010	7:35:42 PM	Bubbler valve closed
12/8/2010	7:35:42 PM	Helium valve opened
12/8/2010	7:35:42 PM	Main Vac valve opened
12/8/2010	7:35:42 PM	Bypass valve opened
12/8/2010	7:35:42 PM	Helium MFC set to  100.000000
12/8/2010	7:35:42 PM	H2 MFC set to  0.000000
12/8/2010	7:35:42 PM	BCl3 MFC set to  0.000000
12/8/2010	7:35:42 PM	PHl3 MFC set to  0.000000
12/8/2010	7:35:42 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:35:42 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:35:43 PM	Tube furnace set to 0
12/8/2010	7:36:43 PM	Helium valve closed
12/8/2010	7:36:43 PM	H2 valve closed
12/8/2010	7:36:43 PM	BCl3 valve closed
12/8/2010	7:36:43 PM	PH3 valve closed
12/8/2010	7:36:43 PM	SiCl4 pre valve closed
12/8/2010	7:36:43 PM	SiCl4 post valve closed
12/8/2010	7:36:43 PM	Bubbler valve closed
12/8/2010	7:36:43 PM	Main Vac valve opened
12/8/2010	7:36:43 PM	Bypass valve opened
12/8/2010	7:36:43 PM	Helium MFC set to  0.000000
12/8/2010	7:36:43 PM	H2 MFC set to  0.000000
12/8/2010	7:36:43 PM	BCl3 MFC set to  0.000000
12/8/2010	7:36:43 PM	PHl3 MFC set to  0.000000
12/8/2010	7:36:43 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:36:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:36:43 PM	Tube furnace set to 0
12/8/2010	7:37:43 PM	H2 valve closed
12/8/2010	7:37:43 PM	BCl3 valve closed
12/8/2010	7:37:43 PM	PH3 valve closed
12/8/2010	7:37:43 PM	SiCl4 pre valve closed
12/8/2010	7:37:43 PM	SiCl4 post valve closed
12/8/2010	7:37:43 PM	Bubbler valve closed
12/8/2010	7:37:43 PM	Helium valve opened
12/8/2010	7:37:43 PM	Main Vac valve opened
12/8/2010	7:37:43 PM	Bypass valve opened
12/8/2010	7:37:43 PM	Helium MFC set to  100.000000
12/8/2010	7:37:43 PM	H2 MFC set to  0.000000
12/8/2010	7:37:43 PM	BCl3 MFC set to  0.000000
12/8/2010	7:37:43 PM	PHl3 MFC set to  0.000000
12/8/2010	7:37:43 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:37:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:37:43 PM	Tube furnace set to 0
12/8/2010	7:38:43 PM	Helium valve closed
12/8/2010	7:38:43 PM	H2 valve closed
12/8/2010	7:38:43 PM	BCl3 valve closed
12/8/2010	7:38:43 PM	PH3 valve closed
12/8/2010	7:38:43 PM	SiCl4 pre valve closed
12/8/2010	7:38:43 PM	SiCl4 post valve closed
12/8/2010	7:38:43 PM	Bubbler valve closed
12/8/2010	7:38:43 PM	Main Vac valve opened
12/8/2010	7:38:43 PM	Bypass valve opened
12/8/2010	7:38:43 PM	Helium MFC set to  0.000000
12/8/2010	7:38:43 PM	H2 MFC set to  0.000000
12/8/2010	7:38:43 PM	BCl3 MFC set to  0.000000
12/8/2010	7:38:43 PM	PHl3 MFC set to  0.000000
12/8/2010	7:38:43 PM	SiCl4 MFC set to  0.000000
12/8/2010	7:38:43 PM	Bypass solenoid MFC set to  0.000000
12/8/2010	7:38:43 PM	Tube furnace set to 0
12/8/2010	7:38:44 PM	Run finished at 7:38 PM
12/8/2010	7:38:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
